Aperture Array Sealed by Ultra Thin Membrane for Non-Vacuum SEM Imaging
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Solution Overview
Problem
Conventional scanning electron microscopes face limitations in throughput and practicality when operating in non-vacuum environments due to the use of ultra-thin membranes, which restrict the size of the supporting aperture and reduce resolution.
Innovation Solution
A method and system that utilize an aperture array sealed by ultra-thin membranes, allowing electron beams to pass through multiple apertures simultaneously, enabling higher resolution imaging while withstanding pressure differences between vacuum and non-vacuum environments, and incorporating mechanical movements to increase the field of view and resolution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an ultra thin membrane is used to seal the aperture, then the membrane can withstand vacuum pressure and allow electron transmission, but the supporting aperture size becomes small which reduces throughput
Solution Approach 1:
The patent divides the single aperture into multiple apertures arranged in an array. Each aperture is sealed by the ultra thin membrane, allowing the total open area to be increased while maintaining the integrity of individual sealed regions. This segmentation enables higher throughput without compromising vacuum sealing capability.
Solution Approach 2:
The patent transitions from a single aperture (one-dimensional concept) to an aperture array (two-dimensional arrangement). By distributing multiple apertures across the membrane surface, the system increases the total effective aperture area while each individual aperture remains small enough to be properly sealed by the ultra thin membrane.
2Use of energy by moving object
If an ultra thin membrane is used to seal the aperture, then electron transmission is enabled, but the small aperture size reduces imaging resolution
Solution Approach 1:
By creating an array of multiple apertures, the system provides multiple pathways for electron transmission. The combined effect of multiple apertures increases the total electron flux while each individual aperture maintains the precision needed for high-resolution imaging.
Solution Approach 2:
The patent combines the signals from multiple apertures to achieve high-resolution imaging. By merging the electron beams from multiple apertures and coordinating their operation, the system attains both high throughput and high imaging resolution.
3Productivity
If multiple apertures are used in an aperture array, then throughput is increased, but the system complexity increases
Solution Approach 1:
The aperture array is designed to perform multiple functions: it provides vacuum sealing, enables electron transmission, and supports high-resolution imaging simultaneously. The unified structure of the membrane-sealed aperture array eliminates the need for separate components for each function, reducing overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the throughput and practicality of scanning electron microscopes by allowing higher resolution imaging in non-vacuum environments, improving the ability to scan multiple areas and achieve higher resolution images while maintaining mechanical stability.
Implementation Method 1
wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment
Implementation Method 2
detecting particles generated in response to an interaction between the at least one electron beam and the object
Data Source
AI summary
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.