Aperture Movement Unit for Automated Dark-Field Imaging
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Solution Overview
Problem
Current methods for acquiring dark-field images using transmission electron microscopes require manual operation to switch between observation modes and adjust the objective aperture, making the process time-consuming and labor-intensive.
Innovation Solution
A charged particle beam device equipped with a display unit, selection unit, condenser unit, projective unit, aperture, movement unit, and detection unit, allowing for automatic selection and positioning of the aperture based on the desired image portion, eliminating the need for manual mode switching and aperture adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual operation is used to switch between observation modes and adjust the objective aperture, then the operator can capture dark-field images, but the process becomes time-consuming and labor-intensive
Solution Approach 1:
The system pre-calculates and stores the correspondence between diffraction spot positions and objective aperture positions. When a diffraction pattern is acquired, the control unit automatically retrieves the pre-stored positional information and moves the aperture to the correct position without requiring manual intervention, thus eliminating time-consuming manual operations while maintaining ease of use
Solution Approach 2:
The system enables automatic capture of dark-field images by having the control unit autonomously switch between observation modes and adjust the objective aperture position based on diffraction pattern analysis. The operator simply initiates the process, and the system performs all subsequent operations automatically, significantly reducing both time consumption and operational complexity
2Measurement precision
If manual adjustment of the objective aperture position is required, then precise positioning can be achieved, but the operation becomes complex and time-consuming
Solution Approach 1:
The system acquires a diffraction pattern, analyzes the spot positions, and uses this feedback information to automatically determine and adjust the objective aperture position. The control unit continuously monitors the diffraction pattern and adjusts the aperture positioning accordingly, maintaining precise positioning while eliminating complex manual operations
Solution Approach 2:
The system replaces manual mechanical adjustment of the objective aperture with an automated control system that uses electronic signals to position the aperture. The control unit automatically calculates the required aperture position based on diffraction spot coordinates and actuates the aperture mechanism accordingly, maintaining precision while reducing operational complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and automated capture of transmission images corresponding to any diffraction spot and diffraction patterns, significantly reducing operational labor and time.
Implementation Method 1
a condenser unit (102 to 104) which irradiates a sample (131) with a charged particle beam (130)
Implementation Method 2
a projective unit (110 to 113) which forms an image of the sample
Implementation Method 3
an aperture (106, 107) which is disposed inside the projective unit (110 to 113) and in which a plurality of openings, having different sizes, for transmitting an electron beam from the sample are formed
Data Source
AI summary
A charged particle beam device wherein a transmission image corresponding to an arbitrary diffraction spot or a diffraction pattern corresponding to a partial range in the transmission image are easily and automatically captured. A charged particle beam device having: an image-capturing unit for forming an image of a sample; a diaphragm disposed in the image-capturing unit, a plurality of openings having different sizes for transmitting an electron beam from the sample being formed in the diaphragm; a movement unit for varying the position of the diaphragm; and a display unit for displaying the formed image, wherein when the operator selects, e.g., a diffraction spot (A) on the display unit, the movement unit moves the diaphragm from the positional relationship between the diaphragm and the image in accordance with the position of the diffraction spot (A).