Apparatus and method for 2-phase cooling of test array and condensation prevention during device testing

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Solution Overview

Problem

Existing device testing systems experience significant condensation issues due to cooling below the dewpoint, leading to water damage and reduced test site density due to the need for bulky insulation.

Innovation Solution

A coaxial tube system with a high-pressure refrigerant that maintains surfaces above the dewpoint using a warm refrigerant flow to prevent condensation, eliminating the need for insulation and enhancing test site density.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If cold refrigerant is used to cool the test site below the dewpoint, then cooling effectiveness is improved, but condensation forms on surfaces causing water damage

Engineering Contradiction:
Improvetest site temperatureVSAvoidcondensation and water damage
Core Design Contradiction:
TemperatureVSObject-affected harmful factors

Solution Approach 1:

The refrigerant flow path is segmented into two separate channels: an outer channel that delivers warm refrigerant to prevent condensation on external surfaces, and an inner channel that delivers cold refrigerant to cool the test site. This segmentation allows independent control of surface temperature and test site temperature, resolving the contradiction between cooling effectiveness and condensation prevention.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the cold plate are assigned different thermal characteristics: the outer surface region receives warm refrigerant to maintain temperatures above the dewpoint and prevent condensation, while the inner test site region receives cold refrigerant to achieve effective cooling. This local differentiation of thermal properties allows simultaneous prevention of condensation and maintenance of cooling performance.

Inventive Principle:
Principle #3Local quality

2Object-affected harmful factors

If bulky insulation is installed around tubing to prevent condensation, then water damage is prevented, but test site density is significantly reduced

Engineering Contradiction:
Improvewater damage preventionVSAvoidtest site density
Core Design Contradiction:
Object-affected harmful factorsVSProductivity

Solution Approach 1:

The condensation prevention function is extracted from the insulation layer and integrated directly into the refrigerant delivery system through the outer channel. By delivering warm refrigerant through the outer channel, the system actively prevents condensation on tubing surfaces without requiring external insulation, thereby eliminating the space-consuming insulation layer and maximizing test site density.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The outer channel serves multiple functions: it delivers warm refrigerant to prevent condensation on the cold plate and tubing surfaces, and simultaneously acts as an insulation barrier. This multi-functionality eliminates the need for separate insulation components, reducing overall system complexity and increasing test site density while maintaining water damage prevention.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Object-affected harmful factors

If warm refrigerant flow is used to maintain surfaces above dewpoint, then condensation is prevented, but cooling effectiveness at the test site is reduced

Engineering Contradiction:
Improvecondensation preventionVSAvoidtest site cooling effectiveness
Core Design Contradiction:
Object-affected harmful factorsVSTemperature

Solution Approach 1:

The refrigerant flow is segmented into two distinct streams within the cold plate structure: warm refrigerant flows through the outer channel to prevent condensation on surfaces, while cold refrigerant flows through the inner channel to cool the test site. This segmentation ensures that the warming effect is localized to surface regions while the cooling effect is concentrated at the test site, eliminating the trade-off between condensation prevention and cooling effectiveness.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The refrigerant temperature is locally optimized for different regions: warm refrigerant is delivered to outer surfaces where condensation prevention is needed, while cold refrigerant is delivered to the test site where cooling effectiveness is critical. This local quality differentiation allows each region to receive the appropriate thermal treatment without compromising the other function.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents condensation on surfaces and allows for increased test site density without insulation, improving testing efficiency and reducing water damage.

Implementation Method 1

a first flow field of the cold plate receives the high-pressure refrigerant to heat a surface of the cold plate to a temperature above a dewpoint

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 2

an expansion valve operable to receive high-pressure refrigerant from the outer tubing, reduce a pressure of the high-pressure refrigerant to produce a low-pressure refrigerant

Methodology Applied
Scientific EffectPressure reduction: Depressurisation

Implementation Method 3

a second flow field of the cold plate receives the low-pressure refrigerant to cool a test site during testing of a device under test

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Data Source

PatentUS12474376B2Apparatus and method for 2-phase cooling of test array and condensation prevention during device testing
Publication Date: 2025.11.18 ADVANTEST CORP
  • US12474376B2 patent drawing
  • US12474376B2 patent drawing
  • US12474376B2 patent drawing

AI summary

Embodiments disclosed herein provide cooling for a test array (e.g., a semiconductor test array) using a 2-phase refrigerant. Testing can be performed without any added insulation, which improves test site density significantly. The refrigerant can be provided by any suitable refrigerant source, such as a pump or valve-controlled pressure chamber, for example, and can be provided to a cold plate of a test site, for example. The cold plate can include a flow field or flow channels for guiding the refrigerant to evenly cool surfaces and/or prevent condensation forming on outer surfaces of the cold plate or test site.