Multi-Target Arc Deposition Apparatus for Continuous Vacuum Operation
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Solution Overview
Problem
Arc deposition apparatuses, such as FCVA devices, face operational downtime due to the need to repressurize and re-evacuate the chamber for target replacement and uneven target emission surfaces, which require frequent off-line grinding, leading to inconsistent coatings and prolonged downtime.
Innovation Solution
An arc deposition apparatus with a rotatable support for positioning multiple targets, allowing one target to be operational while another is prepared or inspected for a predetermined morphology, enabling continuous operation without chamber re-pressurization and using sensors like laser distance sensors for efficient surface inspection and grinding within the evacuated chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single target is used in the chamber, then the apparatus structure is simple, but operational downtime increases due to target replacement requirements
Solution Approach 1:
The single target is segmented into multiple targets (first target and second target) positioned at different locations within the chamber. This allows the system to switch between targets without requiring chamber re-pressurization, thereby reducing operational downtime while maintaining a relatively simple apparatus structure.
Solution Approach 2:
The second target is prepared in advance with a predetermined morphology (flat emission surface) while the first target is in use. This preliminary preparation eliminates the need for off-line grinding and allows immediate switching to a pre-prepared target, reducing operational downtime without significantly increasing apparatus complexity.
2Ease of operation
If target emission surface is not prepared in advance, then apparatus operation is simpler, but coating consistency deteriorates
Solution Approach 1:
The emission surface of the second target is prepared in advance to have a predetermined morphology (flat surface) while the first target is being used. This preliminary preparation ensures consistent coating quality when switching targets without complicating the operational procedure, as the system simply switches to the pre-prepared target.
Solution Approach 2:
A laser distance sensor is used to inspect the emission surface morphology instead of manual inspection methods. This automated inspection mechanism ensures precise measurement of surface flatness, maintaining coating consistency while simplifying the operational process by providing objective, quantifiable data.
3Manufacturing precision
If target is ground off-line, then emission surface preparation is thorough, but operational downtime increases
Solution Approach 1:
The second target is ground and prepared with a flat emission surface in advance, while the first target is in use. This preliminary action allows thorough surface preparation without causing operational downtime, as the prepared target is ready for immediate use when switched into position.
Solution Approach 2:
Instead of discarding the first target after use, it is recovered and repositioned as the second target. The target that was previously in the second position is switched to the first position and can be re-prepared if needed, maximizing target utilization and eliminating the need for frequent target replacements.
4Ease of repair
If chamber is re-pressurized for target replacement, then target maintenance is possible, but vacuum re-establishment time increases
Solution Approach 1:
The chamber space is segmented into multiple target positions (first and second targets at different locations). This allows target maintenance and replacement to occur in situ without requiring chamber re-pressurization, as the system can simply switch between the segmented target positions, thereby eliminating vacuum re-establishment time.
Solution Approach 2:
The system maintains continuous vacuum operation by having multiple targets available within the chamber. Target replacement or maintenance actions do not interrupt the vacuum environment, allowing the useful action of deposition to continue without interruption while target maintenance is performed on standby targets.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This setup extends continuous operation, ensures more consistent ion emission, reduces downtime, and enhances the quality and efficiency of ion coatings by allowing regular target maintenance within the vacuum environment, thereby reducing operational and consumables costs.
Implementation Method 1
an electrical power supply for supplying electrical power to the target held in the operative position to form an arc on an emission surface of the operative target
Implementation Method 2
Free electrons flow from the cathode to the anode, creating a plasma vapour of positively charged target ions and negatively charged electrons in the chamber
Implementation Method 3
the inspecting means is a laser distance sensor
Data Source
AI summary
An arc deposition apparatus comprises an evacuatable chamber and means for positioning at least two targets in the chamber, wherein a first one of the at least two targets is positionable in an operative position and another of the at least two targets is positionable in a standby position. An electrical power supply is provided for supplying electrical power to the target held in the operative position to form an arc on an emission surface of the operative target. Means are provided for preparing an emission surface of the target positioned in the standby position to have a predetermined morphology. Alternatively, or in conjunction with the surface preparing means, means are provided for inspecting whether the emission surface of the target positioned in the standby position has a predetermined morphology. Preferably, the positioning means is configured to interchange the at least two targets at a predetermined time.