Arc-Shaped Electrode Array for Reliable Electron Beam Deflection
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Solution Overview
Problem
Existing electron beam writing apparatuses face challenges in efficiently controlling electron beams due to stress concentration and potential breakage of electrodes, particularly at corner portions, which affects the controllability and reliability of the blanking aperture array.
Innovation Solution
The design incorporates an electrode array unit with arc-shaped electrodes surrounding the central portion of through holes, where the end portions of the electrodes face each other, reducing stress concentration and enhancing controllability while maintaining ease of manufacturing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional electrode designs with straight edges are used in the blanking aperture array, then manufacturing is simple, but stress concentration occurs at corner portions leading to electrode breakage and reduced reliability
Solution Approach 1:
The patent applies curvature by designing electrode corner portions with arc-shaped configurations instead of straight edges. This curvature eliminates stress concentration points that would otherwise occur at sharp corners, preventing electrode breakage and improving reliability while maintaining manufacturing feasibility through standard fabrication processes
2Ease of operation
If multiple electrode pairs are provided in through holes for beam deflection control, then electron beam controllability is improved, but stress concentration and breakage risk increase
Solution Approach 1:
The patent designs each electrode in the multiple electrode pairs with arc-shaped corner portions. This curvature configuration is applied to all electrodes simultaneously, allowing multiple electrode pairs to maintain high controllability for electron beam deflection while each individual electrode resists stress concentration and breakage
3Reliability
If electrode corner portions are reinforced to prevent breakage, then reliability improves, but manufacturing precision requirements increase
Solution Approach 1:
The patent employs arc-shaped corner portions that are designed with radii of curvature optimized to balance stress reduction with manufacturing capabilities. This curvature design prevents stress concentration without requiring excessively tight tolerances, maintaining reasonable manufacturing precision requirements while achieving high reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design minimizes electrode breakage and improves electron beam control, ensuring reliable operation and efficient beam deflection in electron beam writing apparatuses.
Implementation Method 1
An electrode pair is provided around the through hole. An electric field (deflection electric field) for deflecting the electron beam is generated between the electrode pair.
Data Source
AI summary
An electronic component of an embodiment includes an electrode array unit including a substrate having a plurality of through holes, each of a plurality of charged particle beams passes through each of the plurality of through holes; and a plurality of electrode pairs provided in each of the plurality of through holes, wherein each of the plurality of electrode pairs includes a first electrode and a second electrode, the first electrode and the second electrode both include an arc-shaped portion and an end portion, the arc-shaped portion of the first electrode and the second electrode surround a central portion of each of the plurality of through holes, and the end portion of the first electrode and the second electrode face each other.