Quadrupole Mass Spectrometry for Low-Pressure Argon Analysis

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Solution Overview

Problem

Conventional element analysis devices struggle with high pressure in the mixed gas discharged from the heating furnace, leading to reduced measurement accuracy in quadrupole mass spectrometers, especially when analyzing low concentrations of Ar in metal powders.

Innovation Solution

The device incorporates a first pressure regulator to reduce the carrier gas pressure to 20-80 kPa and a second pressure regulator to further reduce the mixed gas pressure to 1.5 Pa or less, combined with a vacuum chamber and suction pump to facilitate gas substitution and improve S/N ratio, using a quadrupole mass spectrometer for accurate elemental analysis.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the mixed gas discharged from the heating furnace is introduced directly into the quadrupole mass spectrometer, then the analysis process is simple, but the measurement accuracy is lowered due to high pressure causing ion collisions and space charge effects

Engineering Contradiction:
Improvemeasurement accuracyVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The gas pressure reduction process is segmented into multiple stages: first pressure reduction from atmospheric pressure to intermediate pressure, then second pressure reduction to vacuum level. This segmentation allows each pressure regulator to operate within optimal ranges, achieving high measurement accuracy while managing device complexity through modular pressure control stages.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A vacuum chamber is introduced as an intermediary component between the heating furnace and the quadrupole mass spectrometer. This vacuum chamber serves as a buffer that accommodates the pressure transition, enabling the mass spectrometer to operate in vacuum conditions while receiving gas from the atmospheric pressure heating furnace through controlled pressure reduction.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If the pressure of the mixed gas is reduced to 1.5 Pa or less before introducing into the mass spectrometer, then ion collisions and space charge effects are minimized improving measurement accuracy, but additional pressure reduction equipment is required

Engineering Contradiction:
Improvemeasurement accuracyVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The pressure reduction function is segmented between two pressure regulators: the first pressure regulator reduces pressure from atmospheric level to intermediate level, and the second pressure regulator further reduces it to 1.5 Pa or less. This segmentation distributes the pressure reduction task across multiple components, each operating in optimal pressure ranges.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system changes the pressure parameter in two distinct stages rather than attempting single-stage reduction. The first stage reduces pressure to an intermediate value suitable for the vacuum chamber, and the second stage reduces it further to the vacuum level required by the mass spectrometer, optimizing the operation of each component.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If high pressure carrier gas is used in the heating furnace, then sufficient gas flow is achieved, but the mixed gas pressure remains too high for accurate mass spectrometry analysis

Engineering Contradiction:
Improvegas flow rateVSAvoidmeasurement accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The gas flow management is segmented into two pressure control stages: the first pressure regulator maintains high pressure for sufficient carrier gas flow in the heating furnace, while the second pressure regulator reduces the mixed gas pressure to appropriate levels for mass spectrometry analysis, decoupling the conflicting pressure requirements.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The vacuum chamber acts as an intermediary that receives the high pressure mixed gas from the heating furnace and facilitates its pressure reduction before introduction to the mass spectrometer. This intermediary allows the heating furnace to operate with high pressure carrier gas while the mass spectrometer operates in vacuum conditions.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables high-accuracy quantitative analysis of elements in a vacuum atmosphere, reducing analysis time and improving measurement sensitivity by minimizing ion collisions and space charge effects.

Implementation Method 1

a first pressure regulator that reduces pressure of the carrier gas introduced into the heating furnace to 20-80 kPa

Methodology Applied
Scientific EffectPressure reduction: Depressurisation

Implementation Method 2

a second pressure regulator that reduces pressure of the mixed gas comprising the carrier gas and the sample gas discharged from the heating furnace to 1.5 Pa or less

Methodology Applied
Scientific EffectPressure reduction: Depressurisation

Implementation Method 3

produces a sample gas by evaporating the sample by generating Joule heat by flowing impulse current in the graphite crucible

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 4

combined with a vacuum chamber and suction pump to facilitate gas substitution and improve S/N ratio

Methodology Applied
Scientific EffectVacuum creation: Vacuum

Implementation Method 5

the quadrupole mass spectrometer ionizes the sample gas introduced into an ionization part by thermoelectron released from high temperature filament

Methodology Applied
Scientific EffectThermionic emission: Thermionic Emission

Data Source

PatentEP3509086B1Elemental analysis device and elemental analysis method
Publication Date: 2025.11.05 HORIBA LTD
  • EP3509086B1 patent drawingFigure 1
  • EP3509086B1 patent drawingFigure 2
  • EP3509086B1 patent drawingFigure 3

AI summary

An objective of this invention is to conduct an accurate quantitative analysis on the Ar element contained in a sample gas by an element analysis device comprising a heating furnace and a mass spectrometer for conducting a quantitative analysis on an element in a vacuum atmosphere. The element analysis device comprises: a heating furnace (10) that heats a graphite crucible (11) containing a sample while introducing a carrier gas into the heating furnace (10), thereby vaporizing the sample to generate a sample gas; a quadrupole mass spectrometer (40) that conducts the quantitative analysis on the Ar element contained in the sample gas in a mixed gas comprising the carrier gas and the sample gas discharged from the heating furnace (10), a first pressure regulator (111) that controls the pressure of the carrier gas to be introduced into the heating furnace (10), and a second pressure regulator (126) that controls the pressure of the mixed gas discharged from the heating furnace (10).