Array Lens Module Coplanarity Calibration for Fast 3D Scanning
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Solution Overview
Problem
Traditional detection methods for HPC chips with multiple computing units are limited by slow detection speed and high construction costs, and the coplanarity of multi-lens structures is insufficient, preventing simultaneous scanning and fast, accurate 3D shape detection.
Innovation Solution
An array lens module calibration equipment with a carrying platform, visual positioning, laser alignment, depth-of-field measurement, and coplanarity adjustment modules to precisely adjust and align lens frames, ensuring coplanarity within 3 microns for improved optical performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple lens elements are used for simultaneous scanning to expand field of view, then detection speed is improved, but the coplanarity requirement becomes more stringent and existing optical clamping mechanisms cannot achieve the required precision
Solution Approach 1:
The patent applies preliminary action by performing coplanarity adjustment during the manufacturing process itself, before the lens array is assembled into the final optical system. Special adjustment mechanisms are provided that allow each lens element to be independently positioned and adjusted to achieve the required coplanarity, rather than relying on the final assembly to compensate for misalignments.
Solution Approach 2:
The patent introduces intermediary adjustment mechanisms between the lens elements and the substrate. These mechanisms include adjustable mounting structures and coplanarity adjustment components that act as mediators to fine-tune the positioning of each lens element, enabling precise coplanarity control without requiring the substrate itself to be perfectly flat.
2Measurement precision
If white light interference detection is used to achieve nanometer-level precision, then measurement precision is improved, but detection speed becomes very limited
Solution Approach 1:
The patent segments the detection function by using an array of multiple lens elements, each capable of performing white light interference detection independently. This segmentation allows parallel processing of multiple measurement points simultaneously, maintaining nanometer-level precision for each point while dramatically increasing overall detection speed through parallelism.
Solution Approach 2:
The patent transitions from sequential scanning of a single lens element to simultaneous parallel detection using an array of lens elements. This dimensional change from one-dimensional sequential measurement to two-dimensional parallel measurement enables both high precision and fast detection by measuring multiple points at the same time.
3Device complexity
If traditional optical clamping mechanisms are used to hold lens elements, then device complexity is reduced, but processing precision is insufficient to achieve coplanarity within 10 μm
Solution Approach 1:
The patent performs coplanarity adjustment during the manufacturing process itself, before the lens array is assembled into the final optical system. Special adjustment mechanisms are provided that allow each lens element to be independently positioned and adjusted to achieve the required coplanarity, rather than relying on the final assembly to compensate for misalignments.
Solution Approach 2:
The patent introduces intermediary adjustment mechanisms between the lens elements and the substrate. These mechanisms include adjustable mounting structures and coplanarity adjustment components that act as mediators to fine-tune the positioning of each lens element, enabling precise coplanarity control without requiring the substrate itself to be perfectly flat.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables fast and accurate 3D shape detection with enhanced coplanarity, allowing simultaneous scanning and expanding the field of view, while reducing equipment costs by optimizing lens alignment and adjustment.
Implementation Method 1
The visual positioning module is configured to provide a visual positioning beam to the array lens module, and capture an image of an appearance of the array lens module
Implementation Method 2
The laser alignment module is configured to provide a calibration laser beam which is imaged after passing through the calibration via and the plurality of lens sets
Implementation Method 3
The depth-of-field measurement module is configured to capture a depth-of-field image of the plurality of lens sets to obtain depth-of-field information
Implementation Method 4
The coplanarity adjustment module is configured to adjust relative positions of the plurality of lens frames relative to the substrate in an optical axis direction parallel to the optical axis
Data Source
AI summary
An array lens module calibration equipment includes a carrying platform, a visual positioning module, a laser alignment module, a depth-of-field measurement module, and a coplanarity adjustment module. An array lens module has an optical axis and includes a substrate, a calibration via through the substrate, a plurality of lens frames, and a plurality of lens sets. The visual positioning module is configured to provide a visual positioning beam and capture an image of an appearance to obtain appearance information. The laser alignment module is configured to provide a calibration laser beam so as to obtain alignment information. The depth-of-field measurement module is configured to capture a depth-of-field image to obtain depth-of-field information. The coplanarity adjustment module is configured to adjust relative positions of the plurality of lens frames relative to the substrate in an optical axis direction based on the appearance information, the alignment information, and the depth-of-field information.