Array Substrate Electrostatic Discharging Layer

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

During the fabrication of array substrates, electrostatic charges generated by UV irradiation in photoresist lithography processes can accumulate in active layers of thin film transistors, leading to damage to both the active layers and nearby metallic signal lines.

Innovation Solution

Incorporating an electrostatic discharging layer connected to the semiconductor layer, which includes electrostatic discharging blocks that can dissipate these charges, thereby preventing damage to the active layers and signal lines.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If photoresist lithography processes are used to fabricate array substrates, then manufacturing precision is improved, but electrostatic charges accumulate in active layers causing damage

Engineering Contradiction:

Improvefabrication precisionVSAvoidelectrostatic charge damage

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

An electrostatic discharging layer is introduced as an intermediary component between the active layer and the environment. This layer provides a controlled discharge path for electrostatic charges, preventing uncontrolled discharge that would damage the active layer or signal lines, while allowing the photoresist lithography process to continue with high precision.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Reliability

If electrostatic discharging layer is added to prevent charge accumulation, then reliability is improved, but device complexity increases

Engineering Contradiction:

Improvesubstrate reliabilityVSAvoidstructure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The electrostatic discharging layer is designed to perform multiple functions: it discharges electrostatic charges from the active layer, serves as part of the transistor structure, and can be integrated with existing fabrication processes. This multi-functionality reduces the need for additional separate components, thereby limiting the increase in device complexity while maintaining improved reliability.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The electrostatic discharging layer effectively dissipates electrostatic charges, preventing damage to the semiconductor layer and signal lines, thereby enhancing the reliability and integrity of the array substrate during fabrication.

Implementation Method 1

an electrostatic discharging layer electrically connected to the semiconductor layer and configured to discharge electrostatic charge in the semiconductor layer

Methodology Applied

Scientific EffectElectrostatic discharge: Electrostatic Discharge

Implementation Method 2

the electrostatic discharging layer effectively dissipates electrostatic charges

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS11201176B2Array substrate, display apparatus, and method of fabricating array substrate

Publication Date: 2021.12.14 BOE TECHNOLOGY GROUP CO LTD

AI summary

The present application discloses an array substrate having a plurality of thin film transistors, a display apparatus, and a method of fabricating an array substrate. The array substrate includes a base substrate; a semiconductor layer on the base substrate and including a plurality of active layers respectively for the plurality of thin film transistors; and an electrostatic discharging layer electrically connected to the semiconductor layer and configured to discharge electrostatic charge in the semiconductor layer.