Array Substrate Electrostatic Charge Dispersion Layer

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Solution Overview

Problem

In the fabrication of array substrates for TFT-LCDs, electrostatic charges accumulated during the process can damage TFT devices, leading to electrical drifting and Mura regions due to frictional, contact, and inductive electrification, affecting the stability and uniformity of the display.

Innovation Solution

An array substrate design incorporating an electrostatic charge dispersion layer, which is electrically connected to the source-drain metal layer through via holes and is in the same profile as the second film layer, helps to discharge electrostatic charges and prevent damage to the TFT devices, improving the stability and uniformity of the display.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If via holes are formed to connect conductive layers, then electrical connection is achieved, but electrostatic charge accumulation damages TFT devices

Engineering Contradiction:

ImproveTFT device stabilityVSAvoidelectrostatic charge damage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

An electrostatic charge dispersion layer is introduced as an intermediary between the insulation layer and the second film layer. This dispersion layer acts as a mediator to safely discharge accumulated electrostatic charges through via holes, preventing direct damage to TFT devices while maintaining necessary electrical connections

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The electrostatic charge dispersion layer is formed in advance before final electrical connections are established. This preliminary protective structure is already in place to prevent electrostatic damage during subsequent fabrication processes and before TFT devices become operational

Inventive Principle:

Principle #10Preliminary action

2Ease of manufacture

If photoresist layer is patterned and etched to form via holes, then conductive layers are connected, but TFT devices are struck by electrostatic charges during stripping and cleaning

Engineering Contradiction:

Improvevia hole formationVSAvoidTFT device integrity

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The electrostatic charge dispersion layer serves as a protective intermediary during the via hole formation process. It allows standard photoresist patterning and etching procedures to continue while intercepting and dispersing electrostatic charges that would otherwise damage TFT devices during stripping and cleaning operations

Inventive Principle:

Principle #24Intermediary (Mediator)

3Ease of operation

If pixel electrodes are charged, then display operation is achieved, but electrostatic charges cause electrical drifting and Mura regions

Engineering Contradiction:

Improvepixel electrode chargingVSAvoiddisplay uniformity

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

The electrostatic charge dispersion layer converts harmful accumulated electrostatic charges into beneficial controlled discharge pathways. By providing dedicated via holes for charge dissipation, the system transforms potential damage sources into protective mechanisms that maintain display uniformity and prevent Mura regions

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The electrostatic charge dispersion layer effectively reduces the accumulation of electrostatic charges, preventing damage to the TFT devices and enhancing the stability and uniformity of the display, while also lowering the resistivity of the source-drain metal layer to improve display quality.

Implementation Method 1

the electrostatic charge dispersion layer is in a same profile as the second film layer... helps to discharge electrostatic charges and prevent damage to the TFT devices

Methodology Applied

Scientific EffectElectrostatic discharge: Electrostatic Discharge

Data Source

PatentUS10012879B2Array substrate, method of fabricating the same and liquid crystal display panel

Publication Date: 2018.07.03 XIAMEN TIANMA MICRO ELECTRONICS

AI summary

An array substrate is disclosed. The array substrate includes a substrate, a first film layer on a side surface of the substrate, an insulation layer on the side surface of the substrate, an electrostatic charge dispersion layer on the side surface of the substrate, and a second film layer arranged on the side surface of the substrate. The first film layer, the insulation layer, the electrostatic charge dispersion layer, and the second film layer are sequentially arranged on the substrate. In addition, the insulation layer and the electrostatic charge dispersion layer include via holes, the second film layer is electrically connected with the first film layer through the via holes, and the electrostatic charge dispersion layer is in a same profile as the second film layer.