Array Substrate First Electrode Layer Protects Sensing Resistor
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Solution Overview
Problem
The manufacturing process of touch display panels is complicated and costly due to the need for a masking process to prevent the heavily doped layer in the pressure sensor from being etched off during the formation of the conducting channel, which can lead to a failure in pressure sensing functionality.
Innovation Solution
The use of a first electrode layer to cover the sensing resistor of the pressure sensor before etching, which blocks the etching of the doped layer and allows the second doped layer to be protected without additional masking, simplifying the process and reducing costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a masking process is added to protect the heavily doped layer in the pressure sensor during etching, then the pressure sensor functions normally, but the manufacturing process becomes complicated and cost increases
Solution Approach 1:
The first electrode layer serves as an intermediary protective barrier between the etching process and the heavily doped layer of the pressure sensor. This electrode layer is positioned to cover the sensing resistor area, allowing the etching process to proceed without direct exposure to the pressure sensor's doped layer, thus eliminating the need for a separate masking step while ensuring sensor functionality is preserved
Solution Approach 2:
The first electrode layer performs multiple functions: it serves as both an electrical electrode for the display panel and as a protective barrier during the etching process. This multi-functionality eliminates the need for dedicated masking layers, simplifying the overall manufacturing process while protecting the pressure sensor's heavily doped layer from being etched away
2Ease of manufacture
If the heavily doped layer in the pressure sensor is not protected during etching, then the manufacturing process is simplified, but the pressure sensor fails to work normally
Solution Approach 1:
The first electrode layer acts as an intermediary that allows the etching process to proceed freely for the display panel structures while simultaneously protecting the pressure sensor's heavily doped layer. This intermediary layer is strategically positioned to cover the sensing resistor area, enabling simplified manufacturing without compromising sensor reliability
Solution Approach 2:
The first electrode layer is formed in advance before the etching process, pre-positioned to cover the area where the heavily doped layer of the pressure sensor is located. This preliminary action ensures that when etching occurs, the protective coverage is already in place, preventing accidental etching of the pressure sensor components while maintaining manufacturing simplicity
Data Source
AI summary
An array substrate, a manufacturing method, a touch display panel, a touch display apparatus are provided. The manufacturing method includes: forming a gate on a substrate; forming a first insulating layer covering the gate; forming an active layer and a sensing resistor; forming a first electrode layer covering the sensing resistor; forming a source and a drain; etching the first doped layer at a part being not overlapped with the source and the drain, reserving the first electrode layer to cover the sensing resistor; forming a second insulating layer covering the source and the drain; etching the second insulating layer at a part being overlapped with the sensing resistor to expose the first electrode layer; forming a second electrode layer, and etching the first/second electrode layer at a part where the first/second electrode layer is overlapped with the sensing resistor to expose the sensing resistor.