Array Substrate Layout for Fewer Masks in Light-Sensing Displays
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Solution Overview
Problem
The integration of photosensitive elements and double gate oxide thin film transistors in display panels requires a large number of mask plates, leading to high manufacturing costs and complex process flows.
Innovation Solution
The array substrate design includes a first transistor and a photosensitive element disposed on the same side of the substrate, with the first electrode of the photosensitive element and the second gate of the first transistor formed in the same layer, reducing the number of mask plates needed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the photosensitive element and double gate oxide thin film transistor are integrated using conventional processes, then the display panel achieves ambient light detection function, but the number of masks increases to 9-11 marks resulting in high manufacturing costs and long process flow
Solution Approach 1:
The patent merges the fabrication processes of the photosensitive element and the double gate oxide thin film transistor into a unified process flow. Specifically, the second electrode of the photosensitive element is formed in the same mask step as the second gate of the transistor, and the source/drain electrodes are formed simultaneously with the transistor's source/drain structures. This consolidation reduces the total mask count from 9-11 marks to a significantly lower number, thereby reducing manufacturing complexity and cost while maintaining the ambient light detection function.
Solution Approach 2:
The patent designs the device structure so that certain layers and electrodes serve multiple functions. For example, the second electrode of the photosensitive element shares the same formation process and material layer as the second gate of the transistor, making this conductive layer universal to both components. This multi-functionality approach allows a single fabrication step to create structures needed for both the photosensitive element and the transistor, reducing the overall number of masks required.
2Reliability
If the photosensitive element and double gate oxide thin film transistor are integrated using conventional processes, then the display panel achieves ambient light detection function, but the process flow becomes extremely long resulting in low productivity
Solution Approach 1:
The patent combines multiple fabrication steps into fewer process stages. By forming the second electrode of the photosensitive element and the second gate of the transistor in the same mask and deposition step, and by simultaneously forming the source/drain electrodes for both components, the overall process flow is shortened. This merging of steps directly reduces the time and complexity of manufacturing, thereby improving productivity while maintaining the required device functionality.
3Reliability
If the photosensitive element and double gate oxide thin film transistor are integrated using conventional processes, then the display panel achieves ambient light detection function, but the manufacturing cost becomes extremely high
Solution Approach 1:
The patent consolidates the fabrication processes of the photosensitive element and the transistor into a unified manufacturing flow, where shared structures (such as the second gate/second electrode and source/drain regions) are formed in the same mask and deposition steps. This merging eliminates redundant manufacturing steps, reduces material waste, and decreases the number of expensive mask layers required, thereby significantly lowering the overall manufacturing cost while maintaining the ambient light detection function.
Solution Approach 2:
The patent employs universal layer designs where certain conductive layers and structural elements serve dual purposes for both the photosensitive element and the transistor. For instance, the second conductive layer functions as both the second gate for the transistor and the second electrode for the photosensitive element. This universality reduces the total amount of material and processing steps required, directly decreasing manufacturing costs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design saves on the number of mask plates required, thereby reducing manufacturing costs and simplifying the process flow while maintaining the necessary electrical connections and performance.
Implementation Method 1
a photosensitive layer disposed on a side of the first electrode away from the substrate
Data Source
AI summary
An array substrate and a manufacturing method therefor, and a display panel. The array substrate includes a substrate, a first transistor and a photosensitive element; the first transistor and the photosensitive element are disposed on the substrate; the first transistor and the photosensitive element are electrically connected; the first transistor includes a first gate, a first active layer, a second gate stacked, and a source and a drain; the source and the drain are electrically connected to the first active layer respectively; the photosensitive element includes a first electrode, a photosensitive layer, and a second electrode stacked; the first electrode is disposed in the same layer as the second gate, and are electrically connected to the source or drain.