Array Substrate With Graded Insulating Layer for Flexible Displays
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Solution Overview
Problem
In flexible display panels, inorganic films in the array substrate limit flexibility due to material constraints, leading to damage during severe deformation and affecting the display panel's operation, and existing hydrogenation methods are insufficient due to temperature limitations and hydrogen overflow issues.
Innovation Solution
A method for fabricating an array substrate involving a second gate insulating layer with a first sub-insulating layer having a higher hydrogen content and a second sub-insulating layer with a lower hydrogen content, where the first sub-insulating layer acts as a hydrogen source and the second as a barrier, improving hydrogen diffusion to the active layer for enhanced hydrogenation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If inorganic films are used in the array substrate, then the electrical performance is improved, but the flexibility is reduced and damage occurs during severe deformation
Solution Approach 1:
The second gate insulating layer is divided into two sub-layers: a first sub-insulating layer with higher hydrogen content and a second sub-insulating layer with lower hydrogen content. This segmentation allows each sub-layer to serve different functions - the first layer provides hydrogen for hydrogenation while the second layer prevents hydrogen overflow, thereby maintaining electrical performance while enabling flexibility.
Solution Approach 2:
Different regions of the second gate insulating layer are assigned different hydrogen contents. The first sub-insulating layer (closer to the active layer) has higher hydrogen content to facilitate hydrogenation, while the second sub-insulating layer (farther from the active layer) has lower hydrogen content to act as a barrier. This local differentiation resolves the contradiction between electrical performance and flexibility.
2Ease of manufacture
If traditional hydrogenation methods are used, then the process is simple, but hydrogen overflow occurs and hydrogenation is insufficient due to temperature limitations
Solution Approach 1:
The first sub-insulating layer acts as a hydrogen source and intermediary, providing hydrogen atoms to the active layer during hydrogenation. The second sub-insulating layer acts as a barrier intermediary, preventing hydrogen from overflowing. This intermediary structure enables effective hydrogenation without requiring complex temperature control while preventing hydrogen loss.
Solution Approach 2:
The invention changes the hydrogen content parameter of the insulating layer by creating a gradient structure with two sub-layers of different hydrogen contents. This parameter modification allows the system to achieve effective hydrogenation at lower temperatures while preventing hydrogen overflow, improving hydrogenation effectiveness without complicating the manufacturing process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the hydrogenation of the active layer, improving its electrical performance and flexibility of the display panel by maintaining hydrogen concentration gradients and preventing overflow, thus addressing the limitations of existing methods.
Implementation Method 1
a hydrogen content of the first sub-insulating layer is larger than a hydrogen content of the second sub-insulating layer... the first sub-insulating layer acts as a hydrogen source
Data Source
AI summary
Embodiments of the present disclosure provide an array substrate including a base substrate, an active layer on the base substrate, a first gate insulating layer on the active layer, a first gate on the first gate insulating layer, and a second gate insulating layer on the first gate. The second gate insulating layer includes a first sub-insulating layer and a second sub-insulating layer disposed in a direction away from the active layer, and a hydrogen content of the first sub-insulating layer is larger than a hydrogen content of the second sub-insulating layer. A method for fabricating the array substrate and a display panel including the array substrate are also provided.