Array Substrate Separating Region for Bright Dot Defect Repair
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Solution Overview
Problem
In the manufacturing of TFT-LCD array substrates, residual thin film layers can cause electrical connections between adjacent pixel units, leading to uncontrolled bright pixel points (bright dot defects), which affect display quality and are difficult to repair without damaging other thin film structures.
Innovation Solution
A method is introduced to form a separating region between adjacent pixel electrodes by etching a conduction layer and forming a non-electrically connected metal line within this region, using a photoresist layer to create specific exposure and development regions, thereby avoiding electrical connections and reducing bright dot defects without damaging subsequent thin film structures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If laser bonding or cutting process is used to repair bright dot defects, then electrical connection between adjacent pixel units is eliminated, but other thin film structures (passivation layer, common electrode layer) are damaged
Solution Approach 1:
The patent applies preliminary action by forming the separating region during the normal manufacturing process before subsequent thin film layers are deposited. The separating region is created by etching the conduction layer and filling with insulating material in advance, so that when laser repair is needed later, the laser can be applied without damaging previously formed thin film structures like passivation and common electrode layers.
2Ease of manufacture
If photoresist is not fully exposed during exposure and development, then manufacturing process is simpler, but residual photoresist forms conduction layers causing bright dot defects
Solution Approach 1:
The patent introduces an insulating material as an intermediary substance that fills the separating region after the conduction layer is etched. This insulating material prevents any residual conduction layer material from causing electrical connection between adjacent pixel units, thereby solving the bright dot defect problem without requiring perfect photoresist exposure and removal.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces the occurrence of bright dot defects and enhances product quality by ensuring accurate electrical isolation between pixel units, preventing damage to other thin film layers during the repair process.
Implementation Method 1
through one exposure and development process, forming a first photoresist removed region that corresponds to a location of the conduction layer and a photoresist retained region that corresponds to the other region on the surface of the substrate
Implementation Method 2
etching the conduction layer in the first photoresist removed region, so as to form a separating region for avoiding electrical connection of the two adjacent pixel electrodes
Data Source
AI summary
An array substrate and a manufacturing method thereof, a display apparatus are disclosed. The manufacturing method of the array substrate includes a forming a conduction layer (20) for electrically connecting two adjacent pixel electrodes (104) upon forming of the pixel electrodes (104). The method further includes forming a photoresist layer (30) on a surface of a substrate with the conduction layer (20) formed thereon; through one exposure and development process, forming a first photoresist removed region (A) and a photoresist retained region (B). The first photoresist removed region (A) corresponds to a location of the conduction layer (20); the conduction layer (20) in the first photoresist removed region (A) is etched, to form a separating region (106) configured for avoiding electrical connection of pixel electrodes (104) of two adjacent pixel units; and within the separating region (106), a metal line that is non-electrically connected to adjacent two pixel electrodes (104) is formed. With the array substrate and manufacturing method thereof, damage to excessive thin film layers in the array substrate in the course of reducing bright dot defect can be avoided.