Article Positioning System Using Pre-Recorded Error Data
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Solution Overview
Problem
In semiconductor manufacturing, precise positioning of articles with respect to processing tools is time-consuming due to systematic positioning errors and misalignment issues, especially when handling multiple similar articles with different coordinate values.
Innovation Solution
A method and system that compensates for systematic positioning errors by defining specific steps for the first article, recording its data, and using that data to position subsequent similar articles, utilizing a predetermined registration and image processing to align sites of interest with high accuracy, thereby eliminating the need for repetitive alignment procedures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If precise positioning is performed for each article individually, then positioning accuracy is improved, but processing time increases
Solution Approach 1:
The patent applies preliminary action by performing positioning measurements on a first article to determine positioning errors, then using these pre-obtained results to correct positioning for subsequent similar articles. This eliminates the need to repeat full positioning procedures for each article, significantly reducing processing time while maintaining accuracy through error compensation.
Solution Approach 2:
The patent uses copying by creating a model of positioning errors from the first article and applying this copied information to subsequent articles. The positioning error data obtained from the first article serves as a template that can be reused for similar articles, avoiding redundant measurements while preserving positioning precision.
2Measurement precision
If alignment procedures are repeated for each article, then positioning accuracy is maintained, but productivity decreases
Solution Approach 1:
The patent applies universality by creating a universal positioning error model from the first article that can be applied to multiple subsequent articles. This single measurement process serves multiple functions: it characterizes the positioning system errors and provides correction data for all similar articles, eliminating the need for repetitive alignment procedures while maintaining accuracy.
Solution Approach 2:
The positioning error characterization is performed in advance on the first article, and these preliminary results are then reused for subsequent articles. This preliminary action captures the essential positioning characteristics that apply to all similar articles, enabling high-speed processing without sacrificing alignment accuracy.
3Reliability
If full positioning procedures are executed for every article, then positioning reliability is ensured, but time consumption increases
Solution Approach 1:
The patent implements feedback by using positioning error data obtained from the first article to correct positioning for subsequent articles. The system continuously applies this feedback mechanism, where the initial measurement results inform and improve the positioning of all following articles, ensuring reliable positioning while minimizing time consumption.
Solution Approach 2:
The system performs preliminary positioning error characterization on the first article, establishing a reliable error model before processing subsequent articles. This preliminary action ensures that the feedback mechanism has accurate baseline data to work with, maintaining positioning reliability while enabling rapid processing of remaining articles.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Significantly reduces the time required for precise positioning of articles by using pre-recorded data for similar articles, maintaining throughput and accuracy, and correcting for misalignment caused by different article positions relative to the support stage.
Implementation Method 1
an optical system operable to detect an orientation mark provided on the article thereby enabling to locate the article on the stage at a predetermined registration of the article with the stage
Implementation Method 2
acquiring an image of at least a part of the first article to determine, by image processing, the relative position of at least one site of interest on the first article with respect to the processing tool
Data Source
AI summary
A method and system are provided for use in positioning an article, from a group of similar articles, with respect to a processing tool to be applied to the article while the article is located on a stage. A first one of the articles is located on the stage at a predetermined registration of the first article with the stage corresponding to a certain angular orientation of the first article relative to the processing tool. An image of at least a part of the first article is acquired to determine, by image processing, the relative position of at least one site of interest on the first article with respect to the processing tool, thereby enabling to bring said at least one site of interest to the processing position. Data indicative of the relative position of said at least one site of interest of the first article is stored. For another one of said articles to be processed, the predetermined registration of this article with the stage is provide, and the data obtained about the first article is utilized to directly bring the site of interest on said another article to the processing location.