Articulated Multi-Angle Cleaning Tool for Semiconductor Equipment
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Solution Overview
Problem
Conventional cleaning tools struggle to effectively clean confined spaces within semiconductor processing equipment, leading to contamination and increased cleaning times due to their inability to access and adequately clean complex architectures.
Innovation Solution
A maintenance apparatus with an articulated member comprising a first member and a second member, rotationally coupled about an articulation axis, allowing for multi-angle cleaning with various tool engagements, such as picks and brushes, to reach and clean difficult-to-access areas within processing tools.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional cleaning tools are used, then the cleaning process is simple, but the tools cannot access confined spaces and complex architectures within semiconductor processing equipment
Solution Approach 1:
The cleaning tool is divided into multiple segments or components including an elongate shaft with modular attachments. The shaft can be segmented into extendable sections, and cleaning heads can be detached and replaced based on specific cleaning needs, allowing access to confined spaces while maintaining operational simplicity.
Solution Approach 2:
The cleaning tool employs a nested structure where cleaning heads, brushes, or picks can be inserted into or attached to the elongate shaft. The modular components nest together, enabling the tool to reach into tight spaces through small access points while the overall structure remains manageable and easy to operate.
2Reliability
If generic cleaning tools are used, then the tool design is simple, but the tools do not adequately perform the desired cleaning function on specific components
Solution Approach 1:
The cleaning tool is designed as a universal system with a standardized elongate shaft that can accommodate multiple types of cleaning heads including brushes, picks, and scrapers. This multi-functional design allows a single base tool to perform various cleaning tasks on different component architectures, ensuring reliable cleaning effectiveness without requiring completely different tools for each application.
Solution Approach 2:
Different cleaning heads with specialized geometries and materials are attached to the shaft depending on the specific cleaning task. For example, soft brushes for delicate surfaces, rigid picks for stubborn contaminants, or shaped scrapers for specific component geometries. This local optimization of tool properties ensures effective cleaning for each specific application while maintaining a simple universal shaft design.
3Ease of operation
If equipment is disassembled to access difficult areas, then cleaning access is improved, but the maintenance time and complexity increase
Solution Approach 1:
The cleaning tool features an elongate shaft with flexible or articulating sections that can dynamically adjust to reach into confined spaces and complex architectures within assembled equipment. The tool can bend, extend, or articulate to navigate around obstacles and access difficult-to-reach areas without requiring equipment disassembly, significantly reducing maintenance time while maintaining cleaning effectiveness.
Data Source
AI summary
In some embodiments, a maintenance apparatus is provided for maintaining semiconductor processing equipment. The maintenance apparatus has an articulated member having a first member with a handle engagement portion and a second member with a first tool engagement portion. The first member is rotationally coupled to the first member about an articulation axis. A first tool member in selective engagement with the first tool engagement portion of the second member.