Automated Asbestos Particle Detection in Electron Microscopy

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Solution Overview

Problem

Current asbestos analysis methods rely on visual observation, which can be operator-dependent and result in unstable asbestos concentration calculations due to varying skill levels, making it difficult to achieve accurate particle concentration measurements.

Innovation Solution

A charged particle beam device equipped with an electron microscope, energy dispersive X-ray spectrometer, and advanced image processing capabilities that automatically detects and measures asbestos particles, utilizing multiple modes (TEM, STEM, SEM) and threshold values to determine asbestos presence and concentration with high accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If visual observation method is used to count asbestos particles, then the counting process is simple and quick, but the measurement precision deteriorates due to operator skill level variations

Engineering Contradiction:
Improvecounting speedVSAvoidasbestos concentration accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent replaces the manual visual observation and counting method with an automated charged particle beam device that uses electron beam irradiation to detect and count asbestos particles. The device captures images using an electron microscope and automatically identifies particles based on their diffraction patterns, eliminating operator skill level variations and achieving consistent, high-precision measurements while maintaining efficient processing speed

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system performs self-service by automatically detecting, identifying, and counting asbestos particles without human intervention. The charged particle beam device autonomously captures images, analyzes diffraction patterns, distinguishes asbestos from non-asbestos particles, and calculates concentrations, making the measurement process independent of operator expertise

Inventive Principle:
Principle #25Self-service

2Measurement precision

If automated charged particle beam device is used to detect asbestos particles, then the measurement precision is improved, but the device complexity increases

Engineering Contradiction:
Improveasbestos concentration accuracyVSAvoiddevice structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The charged particle beam device is designed as a multi-functional system that combines electron microscope imaging, energy dispersive X-ray spectrometer for elemental analysis, and automated image processing capabilities. This universal device can detect and analyze various types of particles using the same platform, justifying the increased complexity through its broad applicability and high measurement precision across different particle types

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent introduces an image processing unit as an intermediary that bridges the electron microscope imaging and the final particle identification. This intermediary component automatically processes captured images, enhances particle visibility, and extracts diffraction patterns, reducing the need for complex manual analysis procedures and simplifying the overall system operation despite the advanced hardware involved

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise and consistent calculation of asbestos concentration, reducing operator variability and improving analysis accuracy by automating the detection and measurement processes.

Implementation Method 1

when analyzing an element of a sample according to an electron beam diffraction phenomenon

Methodology Applied
Scientific EffectElectron beam diffraction: Diffraction

Implementation Method 2

classifying physical and chemical properties on a pollution source classification table after analyzing the collected samples

Methodology Applied
Scientific EffectX-ray emission: X-Ray

Data Source

PatentEP3779403B1Charged particle beam device
Publication Date: 2024.07.03 HITACHI HIGH TECH CORP
  • EP3779403B1 patent drawingFigure 1
  • EP3779403B1 patent drawingFigure 2
  • EP3779403B1 patent drawingFigure 3

AI summary

A particle concentration, particularly an asbestos concentration, is calculated with high accuracy. A charged particle beam device 10 includes an electron microscope 11 and a control unit 13. The electron microscope 11 irradiates a sample 51 with an electron beam 50 to capture a microscope image. The control unit 13 determines a particles detected from the microscope image captured by the electron microscope 11, and calculates the particle concentration of the determined particle. The control unit includes an image acquisition unit 32 and a determination unit 33. The image acquisition unit 32 acquires the microscope image captured by the electron microscope 11. The determination unit 33 determines whether the particle as a detection target exists in the microscope image acquired by the image acquisition unit 32, counts the number of particle as a detection target when it is determined that the particle as a detection target exists, and calculates the particle concentration based on the counted number of particle.