Asymmetric MEMS Sensor Beams for Stable High-Sensitivity Detection
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Solution Overview
Problem
Existing sensors face challenges in achieving high sensitivity, linear scale-factor, and stable resonance characteristics due to asymmetrical configurations of beam ends and flexible connections, which hinder the attainment of a high Q value and accurate force detection.
Innovation Solution
The sensor design incorporates asymmetrical configurations with one end of the beams directly connected to a support region and the other end connected via a deformable linking and connecting portion, allowing for efficient force transmission and stable deformation, enhancing sensitivity and resonance characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If symmetrical beam configurations are used in MEMS sensors, then structural simplicity and ease of manufacture are improved, but sensitivity, linear scale-factor, and operational stability deteriorate
Solution Approach 1:
The patent applies asymmetry by configuring the first beam and first opposing beam with different widths along the first direction. Specifically, the first beam has a first width and the first opposing beam has a second width that is different from the first width. This asymmetrical configuration breaks the symmetry of traditional MEMS sensors, enabling improved sensitivity and linear scale-factor while maintaining manufacturability through standard fabrication processes.
2Device complexity
If symmetrical beam configurations are used in MEMS sensors, then structural simplicity is improved, but operational stability and Q value deteriorate
Solution Approach 1:
The patent implements asymmetry in the beam structure where the first beam and first opposing beam have different widths. This asymmetrical design enhances operational stability and Q value by creating balanced electrostatic forces during operation, preventing mode coupling, and ensuring stable resonance characteristics, thereby improving reliability without significantly increasing device complexity.
3Strength
If connecting portion width is increased, then structural strength is improved, but force transmission efficiency and sensitivity deteriorate
Solution Approach 1:
The patent applies local quality by creating a width gradient in the beam structure. The connecting portion has a third width that is narrower than both the first width and second width of the beams. This localized narrowing at the connecting portion optimizes force transmission efficiency and sensitivity while the broader beam sections maintain structural strength, achieving a balance between these competing requirements.
Data Source
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AI summary
According to one embodiment, a sensor includes a first beam, a first opposing beam, a support portion, a first linking portion, and a first connecting portion. The first beam includes a first portion and a first other portion. A direction from the first portion to the first other portion is along a first direction. A second direction from the first opposing beam to the first beam crosses the first direction. The first opposing beam includes a first opposing portion and a first other opposing portion. The first linking portion is connected to the first other portion and the first other opposing portion. The first connecting portion is connected to the first linking portion. A first connecting portion width along the second direction of the first connecting portion is narrower than a first linking portion width along the second direction of the first linking portion.