Asymmetric MEMS Switch Structure for High-Voltage Durability
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
MEMS switches face challenges in reliably operating between input and output terminals with large voltage differences for extended periods due to structural degradation from repeated switching operations, particularly under high voltage and current conditions.
Innovation Solution
The design of a micro-electromechanical (MEMS) switch with a conductive beam anchored by a conductive post, featuring a mechanical stopper and asymmetric positioning of the post relative to the beam ends, which tilts to form conductive paths and suppresses elastic deformation, allowing for high voltage and current applications.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If MEMS switch structure is used for high voltage and high current applications, then the switch can handle large voltage differences, but the structure degrades over time due to repeated switching operations
Solution Approach 1:
The patent applies asymmetry by positioning the conductive post closer to one end of the conductive beam rather than at the center. This asymmetric configuration creates unequal moment arms that reduce the mechanical stress and elastic deformation experienced by the beam during switching operations, thereby improving structural durability while maintaining high voltage handling capability
Solution Approach 2:
The patent changes the mechanical parameters of the switch structure by introducing a mechanical stopper that limits the tilt angle of the conductive beam. This parameter control prevents excessive deformation during switching, reducing cumulative stress and improving reliability under high power conditions
2Stability of the object's composition
If the conductive post is positioned asymmetrically closer to one end of the beam, then elastic deformation is suppressed, but the mechanical stress distribution changes
Solution Approach 1:
The mechanical stopper acts as an intermediary element that mediates the stress distribution in the system. By providing a controlled contact point during beam tilt, it prevents excessive stress concentration at the beam-root junction while maintaining the asymmetric configuration's benefits for reducing elastic deformation
3Reliability
If the conductive beam tilts to form a conductive path, then electrical connection is established, but arcing and mechanical wear occur under high current conditions
Solution Approach 1:
The patent controls the tilt angle parameter of the conductive beam through the mechanical stopper, ensuring that the beam makes controlled contact with the contact electrode. This parameter control reduces impact forces and arc duration during switching, minimizing mechanical wear and arcing damage under high current conditions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the reliability and durability of MEMS switches by increasing the operating voltage and reducing mechanical stress, making them suitable for high voltage and current applications while minimizing arcing and mechanical failure.
Implementation Method 1
upon activation of the MEMS switch, the conductive beam is configured to tilt such that one side of the conductive beam contacts one of the pair of contact electrodes
Implementation Method 2
the mechanical stopper is configured to substantially suppress an elastic deformation of one or both of the conductive beam and the conductive post
Data Source
AI summary
High voltage microelectromechanical systems (MEMS) switches are described. The MEMS switches can be actively opened and closed. The switch can include a beam coupled to an anchor on a substrate by one or more hinges. The switch can include control electrodes, disposed on a surface of the substrate, for electrically controlling the beam. The anchor is asymmetrically positioned with respect to the two ends of the beam and is electrically connected to a middle electrode. A stopper serves as a pivot point during actuation of the switch to reduce the mechanical stress on the hinges.