Asymmetric Radiation Shield for Substrate Processing Temperature Uniformity
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Solution Overview
Problem
Substrate processing apparatuses face challenges in maintaining uniform temperature gradients during deposition processes, leading to non-uniform physical properties and thickness of deposited layers, which affects the quality and productivity of integrated circuits.
Innovation Solution
A radiation shield with an asymmetric shape, featuring a shield plate with a first portion containing multiple through holes and a second portion without through holes, is integrated into the substrate processing apparatus. This design improves the uniformity of heat radiation, thereby correcting the temperature gradient of the chuck plate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a radiation shield is disposed adjacent to the chuck plate to maintain high temperature, then the temperature maintenance is improved, but the temperature uniformity across the chuck plate deteriorates
Solution Approach 1:
The radiation shield is designed with an asymmetric structure where the first portion has through holes and the second portion does not. This asymmetric configuration creates different heat radiation characteristics in different regions, allowing the shield to maintain temperature while compensating for temperature gradients across the chuck plate surface.
Solution Approach 2:
The radiation shield has different structural properties in different regions: the first portion contains through holes that allow heat radiation to pass through, while the second portion is solid and blocks heat radiation. This local differentiation enables precise control over heat distribution patterns to achieve uniform temperature across the chuck plate.
2Manufacturing precision
If through holes are added to the radiation shield to improve heat radiation uniformity, then the temperature gradient uniformity is improved, but the shield structure complexity increases
Solution Approach 1:
The radiation shield is segmented into two distinct portions: a first portion with through holes and a second portion without through holes. This segmentation allows each portion to perform its specific function - the first portion controls heat radiation to improve temperature uniformity, while the second portion provides structural support and blocks excessive radiation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of the asymmetric radiation shield enhances the uniformity of the temperature gradient across the chuck plate, leading to improved uniformity in the physical properties and thickness of deposited layers, thereby increasing the quality and productivity of substrates.
Implementation Method 1
a radiation shield may be disposed under and spaced apart from the chuck plate... the plurality of through holes are disposed in first portion and along the center line of the shield plate... improves the uniformity of heat radiation, thereby correcting the temperature gradient of the chuck plate
Data Source
AI summary
A radiation shield includes a shield plate that includes a first portion, a second portion, and a plurality of pin holes that pass through the shield plate. The first portion includes a plurality of through holes that pass through the shield plate, and the second portion does not include the plurality of through holes.