Asymmetric Shield Cap Mounting for Sputtering Film Peeling
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional sputtering apparatuses face issues with film peeling around fixing bolts, leading to shortened preventive maintenance cycles and deposition of impurities on chamber walls, causing discharge instability.
Innovation Solution
A shield mask mounting fitting with an asymmetric cap hook and shield cap structure, featuring a rough surface and bushing to securely cover the periphery of the fixing hole, preventing deposition and maintaining stability without increasing apparatus size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a conventional fixing bolt structure is used to mount the shield mask, then the installation is simple, but film peeling occurs around the fixing bolt leading to shortened preventive maintenance cycles
Solution Approach 1:
A cap hook is introduced as an intermediary component between the fixing bolt and the shield mask. The cap hook surrounds the fixing bolt and provides a stable mounting structure that prevents film peeling, thereby extending the preventive maintenance cycle while maintaining installation simplicity
Solution Approach 2:
The mounting structure uses a composite assembly of the cap hook, bushing, and shield cap working together. The cap hook provides mechanical support, the bushing ensures proper positioning, and the shield cap covers the fixing area, creating a composite solution that prevents film peeling
2Device complexity
If the shield mask is mounted with a conventional symmetric structure, then the design is simple, but internal deposition occurs around the fixing hole
Solution Approach 1:
The cap hook and shield cap are designed with asymmetric structures relative to the axis extending through the center of the fixing bolt. This asymmetric design creates effective shielding that prevents internal deposition around the fixing hole while maintaining reasonable structural complexity
Solution Approach 2:
The shield cap extends beyond the cap hook in multiple directions to provide omnidirectional coverage around the fixing hole. This three-dimensional extension creates comprehensive shielding that prevents deposition from various angles
3Ease of manufacture
If a symmetric cap hook and shield cap structure is used, then manufacturing is easier, but the shielding effectiveness is reduced
Solution Approach 1:
The asymmetric structure of the cap hook and shield cap is specifically designed to optimize shielding effectiveness. The offset centers and asymmetric geometry create better coverage around the fixing hole, improving shielding performance while remaining manufacturable
Data Source
AI summary
A shield mask mounting fitting includes a shied mask to be mounted on a chamber wall of a sputtering apparatus, the shield mask including a fixing hole, a fixing bolt connecting the shield mask to the chamber wall through the fixing hole, a cap hook surrounding a top of the fixing bolt, a bushing extending between a surface of the shield mask and the cap hook, and a shield cap engaged with the cap hook and covering the top of the fixing bolt, the shield cap extending beyond the cap hook to omnidirectionally cover a periphery of the fixing hole, wherein one of the cap hook and the shield cap has an asymmetric structure with respect to an axis extending through a center of the fixing bolt.