Asymmetric Divergence Slit Control for Low-Angle X-Ray Analysis

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Solution Overview

Problem

Existing X-ray diffraction apparatuses face challenges in maintaining optimal X-ray irradiation width and intensity while minimizing background noise, particularly at low angles, due to limitations in controlling the divergence slit mechanism.

Innovation Solution

An X-ray analysis apparatus with an asymmetric control unit for the divergence slit mechanism, using a cam mechanism to adjust the slit width asymmetrically based on the goniometer's rotation angle, ensuring precise X-ray irradiation width matching the sample size without increasing background noise.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the slit width of the divergence slit mechanism is increased to increase the divergence angle so that the region R1 does not occur, then the region R2 is enlarged to irradiate a member outside the sample TG, for example, a sample stage, with the X-ray, and hence background noise is increased

Engineering Contradiction:
Improveirradiation coverageVSAvoidbackground noise
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent applies asymmetry by making the divergence angles different on the front side and back side of the sample center. Specifically, the divergence angle on the front side (φ_DS1) is set larger than that on the back side (φ_DS2), allowing the X-ray beam to adequately cover the sample surface while preventing excessive spread that would irradiate surrounding areas and increase background noise.

Inventive Principle:
Principle #4Asymmetry

2Object-generated harmful factors

If the slit width of the divergence slit mechanism is reduced to reduce the divergence angle so that the region R2 does not occur, then the region R1 is enlarged to increase the region in which the sample TG is not irradiated with the light flux LF of the X-ray, and hence a diffracted X-ray intensity to be detected is reduced

Engineering Contradiction:
Improvebackground noiseVSAvoiddiffracted X-ray intensity
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

The patent implements asymmetry in the divergence slit mechanism where the slit widths on the front side and back side of the sample are controlled differently. The front side slit is opened wider to ensure complete sample coverage and maximize diffracted X-ray intensity, while the back side slit is kept narrower to limit background noise, achieving optimal balance between signal strength and noise reduction.

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus effectively maintains consistent X-ray irradiation width and intensity across the sample, reducing regions outside the sample irradiation and minimizing background noise, thereby enhancing the quality of diffraction data.

Implementation Method 1

the asymmetric control unit includes a cam, which is configured to rotate in conjunction with rotation of the goniometer to control the width of the slit

Methodology Applied
Scientific EffectCam mechanism: Cam

Implementation Method 2

an X-ray source configured to irradiate a sample with an X-ray... an X-ray detector configured to detect the X-ray diffracted by the sample

Methodology Applied
Scientific EffectX-Ray: X-Ray

Data Source

PatentEP4036562B1X-ray analysis apparatus
Publication Date: 2025.11.19 RIGAKU CORP
  • EP4036562B1 patent drawingFigure 1
  • EP4036562B1 patent drawingFigure 2A~2B
  • EP4036562B1 patent drawingFigure 3

AI summary

Provided is an X-ray analysis apparatus (100) including: a goniometer (104); a sample stage (2) provided at a rotation center (OG) of the goniometer (104); an X-ray source (F) configured to irradiate a sample (110) with an X-ray, the sample (110) being fixed on the sample stage (2); an X-ray detector (107) configured to detect the X-ray diffracted by the sample (110); and an opening/closing mechanism configured to vary a width of a slit, which is formed between a pair of shielding members (3), by opening/closing the pair of shielding members (3), the opening/closing mechanism including an asymmetric control unit (4) configured to control aperture widths of the pair of shielding members (3) asymmetrically for one of the pair of shielding members (3) on one side and another one of the pair of shielding members (3) on another side depending on a rotation angle (θ) of the goniometer (104).