Asymmetric Light-Emitting Tactile Sensors for Shear Direction Sensing

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current tactile sensors face challenges in scaling up while maintaining spatial resolution and differentiating force direction, particularly in detecting shear stress, due to limitations in resistance or capacitance changes and low sensitivity in certain wavelength ranges.

Innovation Solution

The development of light-based tactile sensors with asymmetrical semiconductor pillars and posts, which emit light upon biasing, allowing for directional sensitivity by varying the orientation and position of these elements, enabling the detection of shear force direction and magnitude through intensity changes captured by an imager.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If multiple sensing elements are used in each sensor pixel to detect force direction, then directional sensitivity is improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvedirectional sensitivityVSAvoidsensor structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent employs asymmetrical semiconductor pillars with non-uniform cross-sectional shapes (e.g., triangular, rectangular, or elliptical) instead of symmetrical cylindrical pillars. This asymmetry creates directional sensitivity because the pillar's mechanical response to applied force varies depending on the force direction relative to the pillar's geometric features. A single asymmetrical pillar replaces multiple sensing elements, thereby reducing device complexity while maintaining directional detection capability.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent introduces local geometric features (such as notches, grooves, or varying cross-sectional dimensions) at specific locations on the semiconductor pillars. These local structural variations create preferential stress distribution patterns when force is applied from different directions, enabling the pillar to encode directional information in its light emission characteristics. This local quality modification allows one pillar to perform the function of multiple sensing elements.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If resistance or capacitance changes are used to detect force direction, then directional information can be obtained, but scaling up the sensor array becomes difficult without sacrificing spatial resolution

Engineering Contradiction:
Improveforce direction detectionVSAvoidsensor array scalability
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent replaces traditional electrical sensing mechanisms (resistance or capacitance measurements) with an optical sensing mechanism. Semiconductor pillars convert mechanical stress from applied force directly into light emission intensity variations through the piezoelectric effect. This optical output can be captured by standard imaging devices, enabling parallel measurement of multiple pillars simultaneously without complex electrical readout circuits, thus facilitating easy scaling of sensor arrays while maintaining high spatial resolution.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent utilizes changes in light emission intensity and wavelength as the output parameter instead of electrical resistance or capacitance. The semiconductor pillars exhibit piezoelectric effect where applied mechanical force changes the material's refractive index and band structure, directly modulating light emission characteristics. This parameter change enables simple optical detection with high signal-to-noise ratio and allows for dense array configuration since each pillar can be independently addressed through its spatial position in the image.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If ZnO nanowire structures are used for optical pressure sensing, then high spatial resolution and scalability are achieved, but the sensor cannot discriminate force direction and shows low sensitivity in ultraviolet range

Engineering Contradiction:
Improvespatial resolution and scalabilityVSAvoidforce direction discrimination
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent modifies the ZnO nanowire structures by introducing asymmetrical geometric features such as varying diameters along the length, non-circular cross-sections, or off-center electrode positions. These asymmetrical modifications break the rotational symmetry of the nanowires, creating directional sensitivity. When force is applied from different directions, the stress distribution within the asymmetric nanowire varies, producing distinct light emission patterns that encode force direction information while maintaining the high spatial resolution and scalability of the original ZnO nanowire platform.

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution provides scalable, high-resolution tactile sensing capable of distinguishing shear force direction and magnitude without requiring stringent uniformity, using a common bias and off-the-shelf imaging technology, while maintaining sensitivity across various wavelengths.

Implementation Method 1

Each pillar includes a stack of semiconductor layers, the stack of semiconductor layers being configured to emit light upon biasing of the stack of semiconductor layers

Methodology Applied
Scientific EffectLight emission from semiconductor layers: Light Emitting Diode

Implementation Method 2

Past devices have discriminated the direction of the stress, including differentiating between normal and shear stress and between different shear stress directions, via detection of resistance or capacitance changes in response to the external force due to structural deformation or via the piezoresistive as well as piezoelectric effects

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentEP3914885B1Light-based tactile sensing with directional sensitivity
Publication Date: 2024.01.10 THE RGT UNIV OF MICHIGAN
  • EP3914885B1 patent drawingFigure 1
  • EP3914885B1 patent drawingFigure 2
  • EP3914885B1 patent drawingFigure 3

AI summary

A device includes a substrate and a set of force sensors supported by the substrate. Each force sensor includes a pillar extending outward from the substrate, each pillar comprising a stack of semiconductor layers, the stack of semiconductor layers being configured to emit light upon biasing of the stack of semiconductor layers, and post disposed along only a portion of a perimeter of the pillar such that, taken together, the pillar and the post have an asymmetrical cross-sectional shape. Each pillar has a cross-section elongated along an axis. An orientation of the axis, and a peripheral position of the portion of the perimeter at which the post is disposed, differ across the set of force sensors such that a variation in light emitted by the stack of semiconductor layers of one or more of the force sensors is indicative of a direction of a shear force applied to the set of force sensors.