Asymmetric Three-Link Robot Conveyance
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Solution Overview
Problem
Conveyance systems face challenges in efficiently conveying substrates to multiple cassettes with a minimal footprint, as increasing the number of robot links to achieve perpendicular conveyance increases costs, and traditional perpendicular conveyance methods struggle with accessing farthest cassettes.
Innovation Solution
The system employs a three-link horizontal multi-articular robot with unequal arm lengths, allowing the robot to perform inclination conveyance by positioning the hand inclined towards the robot, enabling conveyance to all cassettes without the need for additional traveling axes, thus maintaining a compact chamber size and improving efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the number of robot links is increased from three to four to achieve perpendicular conveyance, then the robot can convey substrates to cassettes on the side wall, but the device complexity and manufacturing cost increase
Solution Approach 1:
The patent applies asymmetry by making the second inter-axis distance (L2) longer than the first inter-axis distance (L1). This unequal link configuration allows the three-link robot to achieve conveyance positions that would otherwise require a four-link robot, thereby reducing device complexity while maintaining full access to all cassettes on the side wall
2Productivity
If more cassettes are located on the side wall to improve efficiency, then substrate conveyance efficiency increases, but the footprint and chamber depth requirements increase
Solution Approach 1:
The patent changes the geometric parameters of the robot arms, specifically setting the second inter-axis distance (L2) to be longer than the first inter-axis distance (L1). This parameter modification expands the robot's working envelope, allowing it to serve more cassettes positioned along the side wall without increasing the chamber's overall footprint or depth
3Length of stationary object
If the chamber depth is minimized to reduce footprint, then the conveyance chamber becomes more compact, but the robot's ability to access farthest cassettes is limited
Solution Approach 1:
By implementing asymmetric link lengths where L2 > L1, the robot achieves an extended reach in the depth direction. This asymmetric configuration allows the robot to access cassettes positioned at the farthest points along the side wall even when the chamber depth is minimized, thereby maintaining full cassette accessibility in a compact chamber design
Data Source
AI summary
A conveyance system includes a conveyance chamber including a second side wall opposite to a first side wall in a depth direction of the conveyance chamber. A robot is disposed in the conveyance chamber. The robot includes a body, a first arm, a second aim, and a hand. The body is disposed between the second side wall and a reference position in the depth direction. A second leading end of the second arm is positioned between a restricted position and the reference position in the depth direction when a first inter-axis direction and a second inter-axis direction are substantially perpendicular to the first side wall. A controller is connected to the robot to control the robot to limit entrance into an area between the first side wall and the restricted position in the depth direction.