Asymmetrical MEMS Beam Electrodes for Accurate Force Sensing
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Solution Overview
Problem
Existing sensors using MEMS structures lack the ability to enhance detection characteristics, particularly in terms of dynamic range and accuracy of force detection.
Innovation Solution
The sensor design incorporates asymmetrical first and second beam electrodes with varying masses, thicknesses, materials, hole configurations, and shapes to create a difference in resonance frequencies, allowing for high-accuracy force detection by detecting the difference in resonance frequencies using optical or electrical methods.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If symmetrical beam electrodes are used in MEMS sensor, then manufacturing is simpler, but detection dynamic range and accuracy are limited
Solution Approach 1:
The patent applies asymmetry by designing beam electrodes with different masses, thicknesses, materials, hole configurations, or shapes. This creates different resonance frequencies between the beams, enabling enhanced detection accuracy and expanded dynamic range for force detection while maintaining manufacturability through standard MEMS processes
2Adaptability or versatility
If asymmetrical beam electrodes with different properties are implemented, then detection dynamic range increases, but manufacturing complexity increases
Solution Approach 1:
The patent applies local quality by introducing specific variations in localized regions of the beam electrodes, such as different hole patterns, thickness variations, or material compositions in specific areas. This allows the beams to have different resonance frequencies while still being fabricated using standard MEMS manufacturing processes, balancing performance enhancement with manufacturing feasibility
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The asymmetrical design increases the dynamic range of detection and enables high-accuracy force detection by effectively utilizing the difference in resonance frequencies between the beams.
Implementation Method 1
The first beam electrode and the second beam electrode satisfy at least one of a first condition, a second condition, a third condition, a fourth condition, a fifth condition, a sixth condition, a seventh condition, or an eighth condition. In the first condition, a second mass of the second beam electrode is different from a first mass of the first beam electrode. In the second condition, a second thickness along a first direction of the second beam electrode is different from a first thickness along the first direction of the first beam electrode.
Data Source
AI summary
According to one embodiment, a sensor includes a base, a first support portion fixed to the substrate, and a first member supported by the first support portion. A gap is provided between the base and the first member. The first beam electrode and the second beam electrode satisfy at least one of a first condition, a second condition, a third condition, a fourth condition, a fifth condition, a sixth condition, a seventh condition, or an eighth condition.