Asynchronous Conveyor Network for IC Factory Throughput Bottlenecks
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current material handling systems in IC manufacturing, relying on discrete robot vehicles, face limitations in capacity and responsiveness to manufacturing process variabilities, leading to increased wait times and reduced factory efficiency.
Innovation Solution
The implementation of an asynchronous conveyor network system with autonomous, frictionless conveyor segments and equipment delivery interfaces, enabling collision-free and efficient movement of carriers between process tools, eliminating the need for off-line storage and reducing wait times.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If discrete robot vehicles (OHTs) are used for inter-process substrate movement, then automation of individual carrier moves is achieved, but transport capacity is limited and wait times increase
Solution Approach 1:
The patent replaces the mechanical vehicle-based transport system (OHTs that physically carry carriers) with a conveyor network system where carriers move along fixed tracks. This substitution eliminates the need for discrete robot vehicles while maintaining automated transport, thereby increasing transport capacity and reducing wait times.
Solution Approach 2:
The conveyor network is divided into multiple independent loops (first loop, second loop, third loop) that can operate simultaneously. This segmentation allows multiple carriers to be transported in parallel across different loops, significantly increasing overall transport capacity compared to a single-vehicle system.
2Adaptability or versatility
If discrete robot vehicles are used for substrate transport, then flexibility in moving carriers between tools is provided, but responsiveness to manufacturing process variabilities deteriorates
Solution Approach 1:
The conveyor system incorporates dynamic control where each conveyor loop can independently adjust its operation. The system can respond to manufacturing variabilities by dynamically routing carriers through different loops or adjusting transport timing, maintaining both flexibility and reliability.
Solution Approach 2:
The conveyor network serves multiple functions: it provides dedicated transport paths for different carrier types, handles various process tool interfaces, and accommodates different manufacturing scenarios. This multi-functionality allows the system to adapt to process variabilities while maintaining reliable transport.
3Extent of automation
If vehicle-based transport systems are used, then discrete carrier moves are automated, but wait times for transport service increase
Solution Approach 1:
The conveyor network provides continuous transport service through multiple overlapping loops that operate simultaneously. While one loop is loading a carrier, another is transporting it, and a third is unloading, ensuring continuous useful action without idle wait times between transport operations.
Solution Approach 2:
The system prepares transport paths and positions conveyor segments in advance before carriers need to be moved. This preliminary positioning of transport infrastructure eliminates wait times, as the path is already ready when the carrier arrives, unlike vehicle-based systems that must first position themselves.
4Extent of automation
If discrete robot vehicles are used for material handling, then inter-process substrate movement is automated, but factory capacity is impeded
Solution Approach 1:
The patent transitions from one-dimensional vehicle-based transport (single path, sequential movement) to a multi-dimensional conveyor network with multiple overlapping loops operating in parallel. This dimensional expansion allows simultaneous transport of multiple carriers, dramatically increasing factory capacity while maintaining automated substrate movement.
Data Source
AI summary
Asynchronous conveyor networks serving as inter-process transport mechanisms eliminate transport capacity constraints of vehicle-based systems in integrated circuit (IC) manufacturing environments. Demand variability may be buffered without the use of off-line-storage such as stockers. The variability in wait times for transport service is also eliminated. Overall factory cycle times are thus reduced while manufacturing capacity is simultaneously increased. An autonomous conveyor network automated materials handling system combines clean frictionless conveyor principles with a unique network layout to fulfill the logistics requirements of IC manufacturing environments. Mechanical conveyor-to-tool interfaces, also referred to as equipment delivery interfaces (EDi's), bridge the conveyor network to individual tools. An operating software module integrates the functionality of the conveyor network and EDi's. The result is a full capability factory logistics system.