AT-Cut Quartz Resonator Electrodes for Stable Thickness Shear Vibration

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Solution Overview

Problem

The challenge is to enhance the frequency accuracy and stability of AT cut quartz crystal resonators while minimizing the thickness of the vibrating portion, as reducing thickness increases frequency adjustment sensitivity, leading to poor frequency accuracy and lower production yield, and introduces instability due to spurious vibration coupling.

Innovation Solution

A resonator element design with excitation electrodes shaped as virtual quadrangles, where three corners are cut out, concentrating main vibration energy and reducing spurious vibration area, thereby maintaining frequency stability and reducing capacitance ratio, while allowing efficient energy trapping and minimizing ohmic loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If the thickness of the vibrating portion is reduced to increase frequency, then the frequency increases, but the adjustment sensitivity increases leading to poor frequency accuracy

Engineering Contradiction:
ImprovefrequencyVSAvoidfrequency accuracy
Core Design Contradiction:
SpeedVSMeasurement precision

Solution Approach 1:

The patent applies local quality by creating a non-uniform electrode area distribution - the central electrode area is larger while peripheral areas are reduced. This local variation in electrode geometry allows the central region to maintain strong main vibration excitation while peripheral regions contribute less to spurious vibrations, thereby maintaining frequency accuracy even at higher frequencies achieved through reduced thickness.

Inventive Principle:
Principle #3Local quality

2Speed

If the thickness of the vibrating portion is reduced to increase frequency, then the frequency increases, but the production yield decreases

Engineering Contradiction:
ImprovefrequencyVSAvoidproduction yield
Core Design Contradiction:
SpeedVSProductivity

Solution Approach 1:

By implementing local quality through non-uniform electrode area distribution, the patent reduces sensitivity to manufacturing variations in the thickness direction. The larger central electrode area provides robust main vibration excitation that is less affected by thickness variations, while the reduced peripheral areas minimize spurious vibration coupling. This design tolerance to manufacturing variations directly improves production yield at higher frequencies.

Inventive Principle:
Principle #3Local quality

3Quantity of substance

If the area of excitation electrode is reduced to reduce capacitance ratio, then the capacitance ratio decreases and frequency variable sensitivity increases, but the main vibration may couple with spurious vibration

Engineering Contradiction:
Improvecapacitance ratioVSAvoidoscillation stability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent resolves this contradiction by applying local quality - the central electrode region maintains larger area to strongly excite main vibration and provide stability, while peripheral electrode regions have reduced area to minimize spurious vibration coupling. This spatially differentiated electrode design allows the overall electrode area to be effectively reduced for lower capacitance ratio, while local central area preservation maintains oscillation stability.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The electrode area is segmented into functionally different regions - a central region with larger area for main vibration excitation and peripheral regions with smaller areas. This segmentation allows different parts of the electrode to serve different functions: the central portion ensures stable main vibration while the reduced peripheral portions minimize spurious vibration coupling, achieving both low capacitance ratio and high stability.

Inventive Principle:
Principle #1Segmentation

4Reliability

If the excitation electrode shape is modified to reduce spurious vibration, then oscillation stability improves, but the electrode geometry becomes more complex

Engineering Contradiction:
Improveoscillation stabilityVSAvoidelectrode geometry
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent implements local quality by creating a electrode geometry with a larger central area and reduced peripheral areas. This localized geometric modification targets specifically the peripheral regions where spurious vibrations originate, while preserving the central region for main vibration excitation. The resulting geometry is moderately complex but achieves significant improvement in oscillation stability by suppressing spurious vibration coupling.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves stable thickness shear vibration with reduced frequency variation, improved frequency accuracy, and increased production yield by concentrating main vibration energy and minimizing spurious vibration, resulting in a resonator with enhanced frequency-temperature characteristics and reduced frequency jump phenomena.

Implementation Method 1

a resonator element including a substrate that vibrates in a thickness shear vibration... a first excitation electrode that is provided on the first main surface; and a second excitation electrode that is provided on the second main surface

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS9866198B2Resonator element, resonator, electronic device, electronic apparatus, and moving object
Publication Date: 2018.01.09 SEIKO EPSON CORP
  • US9866198B2 patent drawing
  • US9866198B2 patent drawing
  • US9866198B2 patent drawing

AI summary

A resonator element includes a substrate that vibrates in a thickness shear vibration, a first excitation electrode that is provided on one main surface of the substrate and has a shape in which at least three corners of a virtual quadrangle are cut out, and a second excitation electrode that is provided on the other main surface of the substrate, and a ratio (S2/S1) of an area S1 of the virtual quadrangle and an area S2 of the first excitation electrode satisfies a relationship of 69.2%≦(S2/S1)≦80.1%.