Athermal Optical Modulator Polymer Layer Wavelength Stability

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Solution Overview

Problem

Optical modulators based on silicon substrates experience significant wavelength variations with temperature changes due to their high thermo-optic coefficient, leading to instability in optical signal transmission.

Innovation Solution

An athermal optical modulator design featuring a ring resonator with a polymer layer and strategically positioned contacts, where the ring resonator includes doping regions and a polymer layer covering the ridge unit, minimizing wavelength change with temperature and ensuring stable optical signal transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a silicon substrate is used for the optical modulator, then the device can be manufactured in a process compatible with CMOS and operates at high speed, but the refractive index changes significantly with temperature increase causing wavelength variation of 0.11 nm/K

Engineering Contradiction:
Improveoperating speedVSAvoidwavelength stability
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

The patent applies composite materials by combining silicon substrate with polymer layer (e.g., PMMA) having different thermo-optic coefficients. The polymer layer is deposited on the silicon waveguide structure to compensate for thermal refractive index changes. This composite structure allows the device to maintain wavelength stability while retaining the high-speed operation enabled by the silicon substrate, resolving the contradiction between operating speed and wavelength stability.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent changes the physical parameter of thermo-optic coefficient by introducing materials with different thermal properties. Specifically, the polymer layer has a lower thermo-optic coefficient than silicon, and its refractive index temperature dependence is engineered to compensate for the silicon substrate's thermal expansion effects. This parameter change enables wavelength stabilization without sacrificing the high-speed performance characteristic of silicon-based modulators.

Inventive Principle:
Principle #35Parameter changes

2Stability of the object's composition

If the thermo-optic coefficient is reduced to stabilize wavelength, then wavelength variation decreases, but the device complexity increases due to additional polymer layer and contact structures

Engineering Contradiction:
Improvewavelength stabilityVSAvoidstructure complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent uses a thin polymer film layer deposited directly on the silicon waveguide surface. This thin-film approach provides the necessary thermo-optic compensation without adding significant structural complexity. The polymer layer acts as a flexible shell that conforms to the silicon substrate's thermal expansion, providing wavelength stabilization while maintaining a relatively simple overall device structure that can be integrated with existing CMOS processes.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The polymer layer serves as an intermediary material between the silicon substrate and the optical mode. It mediates the thermal effects by providing a refractive index profile that compensates for silicon's thermal expansion. This intermediary approach stabilizes wavelength without requiring fundamental changes to the silicon device architecture, thus limiting the increase in device complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If doping regions are added to the ring resonator, then electric field formation is improved for modulation, but the manufacturing precision requirements increase

Engineering Contradiction:
Improvemodulation performanceVSAvoiddoping region precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent applies local quality by creating specific doping regions (p+ and n+ regions) at precise locations within the ring resonator structure. These doped regions are positioned to optimize electric field distribution for effective modulation. The local doping approach concentrates the electric field where needed without requiring uniform doping throughout the entire structure, thereby reducing overall manufacturing precision requirements while maintaining reliable modulation performance.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent segments the doping process into distinct regions (p+ doping region, n+ doping region, and intermediate doping regions) with different impurity concentrations. This segmentation allows independent optimization of each region's electrical properties and enables better control over manufacturing precision. By dividing the doping structure into manageable segments, the patent achieves reliable electric field formation while reducing the stringency of overall manufacturing precision requirements.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The athermal optical modulator achieves a minimal wavelength change of 0.5 pm/K, enabling stable and uniform optical signal transmission by reducing the thermo-optic coefficient's impact and ensuring consistent power supply and electric field formation.

Implementation Method 1

due to the relatively high thermo-optic coefficient of Si, a propagation wavelength is changed

Methodology Applied
Scientific EffectThermo-optic coefficient:

Implementation Method 2

the first contact and the second contact forming paths for applying electricity to the ring resonator to form an electric field in the ring resonator

Methodology Applied
Scientific EffectElectric field: Electric Field

Implementation Method 3

a ring resonator configured to receive light input from the waveguide and output modulated light to the waveguide

Methodology Applied
Scientific EffectOptical resonance: Resonance

Data Source

PatentUS9207469B2Athermal optical modulator and method of manufacturing the same
Publication Date: 2015.12.08 SAMSUNG ELECTRONICS CO LTD
  • US9207469B2 patent drawing
  • US9207469B2 patent drawing
  • US9207469B2 patent drawing

AI summary

An athermal optical modulator includes a waveguide, a ring resonator configured to receive light input from the waveguide and output modulated light to the waveguide, the ring resonator including a ridge unit located at a center of the ring resonator in a vertical section, a first contact connected to one side of the ridge unit and a second contact connected to the other side of the ridge unit, the first contact and the second contact forming paths for applying electricity to the ring resonator to form an electric field in the ring resonator, and a polymer layer covering the ridge unit.