Atmospheric Pressure Plasma Generator With External Electrode
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Solution Overview
Problem
Existing atmospheric pressure plasma generators face issues where electrode deterioration can lead to foreign matter contamination of the target object, and without an electrode inside the tubular member, the processing gas cannot be effectively plasmarized.
Innovation Solution
An atmospheric pressure plasma generator design where an inner tube with either positive or negative electrical polarity is inserted inside an outer tube, and an electrode with opposite polarity is placed on the outer surface, allowing electrical discharge between the electrode and the inner tube to plasmarize the processing gas within the outer tube, preventing foreign matter contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If an electrode is arranged inside the tubular member, then processing gas can be plasmarized inside the tubular member, but foreign matter may contaminate the target object due to electrode deterioration
Solution Approach 1:
The invention extracts the electrode from the interior of the tubular member and relocates it to the exterior surface. Specifically, the electrode is arranged on the outer circumferential surface of the tubular member, while the inner circumferential surface remains electrode-free. This extraction eliminates the contamination risk from internal electrode deterioration while preserving plasma generation capability through external electrode configuration.
Solution Approach 2:
The invention introduces a dielectric layer as an intermediary between the electrode and the processing gas. The dielectric layer is formed on the outer circumferential surface of the tubular member, covering the electrode, and enables electrical discharge to occur through this intermediary layer. This mediator allows plasma generation without direct contact between the electrode and processing gas, preventing contamination while maintaining effectiveness.
2Object-affected harmful factors
If no electrode is arranged inside the tubular member, then foreign matter contamination is prevented, but processing gas cannot be suitably plasmarized inside the tubular member
Solution Approach 1:
The invention inverts the conventional electrode arrangement by placing the electrode on the outer circumferential surface rather than the inner circumferential surface of the tubular member. This inversion allows the electrode to face the processing gas from the outside, enabling electrical discharge and plasma generation without requiring internal electrode placement, thus preventing contamination while maintaining productivity.
Solution Approach 2:
The dielectric layer serves as an intermediary that enables the inverted electrode configuration to function effectively. By forming the dielectric layer on the outer surface covering the electrode, the system allows electrical discharge to occur through this intermediary to plasmarize the processing gas inside the tubular member without direct electrode-gas contact.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively plasmarizes processing gas inside the outer tube without an electrode inside, preventing contamination and ensuring efficient plasma emission, even as the electrode deteriorates.
Implementation Method 1
by applying an electric current to the electrode provided on the outer circumferential surface of the outer tube, current flows between the electrode and the inner tube. Thus, electrical discharge occurs between the electrode and the inner tube, and processing gas inside the outer tube is plasmarized
Data Source
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Figure 2
AI summary
Atmospheric pressure plasma generator 20 includes: tubular outer tube 20; inner tube 22, with an outer diameter smaller than an inner diameter of the outer tube, that is inserted inside the outer tube, the inner tube being formed from a material with either positive or negative electrical polarity; and electrode 26 with electrical polarity opposite to that of the material of the inner tube, the electrode being provided on an outer circumferential surface of the outer tube, wherein, in a state with processing gas flowing in at least one of a first flow path inside the inner tube and a second flow path between an outer circumferential surface of the inner tube and an inner circumferential surface of the outer tube, processing gas flowing through the at least one of the first flow path and the second flow path is plasmarized by applying an electric current to the electrode.