Atmospheric Transfer Module Flow Rectifier for Clean Room Footprint Reduction
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The increasing number of processing modules in semiconductor manufacturing systems leads to a larger installation area, making it difficult to arrange multiple systems in facilities like clean rooms, necessitating a reduction in the footprint of the substrate processing system.
Innovation Solution
A substrate transfer system with an atmospheric transfer module that includes a load lock module, a substrate transfer robot with a base that reciprocates along a guide rail, and a flow rectifier creating an obliquely downward air flow, reducing the size of the atmospheric transfer module and suppressing air turbulence, thereby minimizing the overall installation area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of processing modules is increased to enhance processing capability, then productivity is improved, but the installation area increases making it difficult to arrange multiple systems in facilities
Solution Approach 1:
The patent combines the load lock chamber and transfer chamber into a single atmospheric transfer module, eliminating the need for separate vacuum transfer systems. This integration reduces the overall installation area while maintaining the capability to handle multiple substrates through the combined processing modules.
Solution Approach 2:
The substrate transfer robot moves along the sidewall of the atmospheric transfer module in a linear reciprocating motion, utilizing vertical and lateral space efficiently. This dimensional arrangement allows for compact positioning of processing modules without increasing the horizontal footprint of the system.
2Area of stationary object
If the atmospheric transfer module size is reduced to minimize installation area, then the installation area is decreased, but transfer space and substrate handling capability may be compromised
Solution Approach 1:
The substrate transfer robot employs a dynamic reciprocating base that moves along the sidewall guide rail, allowing flexible positioning within the compact atmospheric transfer module. This dynamic movement enables adequate transfer space for substrate handling while maintaining a reduced overall module size.
Solution Approach 2:
The flow rectifier creates controlled air flow patterns within the compact transfer chamber, ensuring proper atmospheric conditions for substrate transfer. This pneumatic control maintains sufficient transfer space and handling capability despite the reduced module dimensions.
3Manufacturing precision
If a flow rectifier is added to suppress air turbulence and create controlled air flow, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The flow rectifier acts as an intermediary component between the moving base and the substrate, creating controlled air flow patterns that suppress turbulence. This single intermediary element effectively improves substrate transfer precision without requiring multiple complex control systems.
Solution Approach 2:
The flow rectifier is integrated with the moving base structure, utilizing the base's own movement to generate the necessary air flow patterns. This self-service approach creates controlled atmospheric conditions without requiring separate active control mechanisms, thereby limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces the size of the substrate processing system, allowing for more efficient use of space in clean rooms while maintaining sufficient transfer space and increasing the number of substrates processed per unit time.
Implementation Method 1
a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base
Data Source
AI summary
A substrate transfer system includes a load lock module, an atmospheric transfer module having a first sidewall adjacent to the load lock module and a second sidewall remote from the load lock module, the atmospheric transfer module being connected to the load lock module, and a substrate transfer robot disposed in the atmospheric transfer module. The substrate transfer robot includes a base configured to reciprocate along the first sidewall, a substrate transfer arm disposed on the base, and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base.