Atom Probe Microscope Multimodal Imaging Atomic Composition
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Solution Overview
Problem
Current atom probe tomography techniques face limitations such as low percentage of correctly identified atoms, insufficient detection resolution, and cumbersome systems that hinder high-precision atomic structure identification, leading to extended processing times and reduced applicability.
Innovation Solution
The implementation of a dynamic integrated multimodal imaging system that alternates between non-destructive and destructive imaging modes, using a chamber with an imaging gas to enhance specimen analysis, where energy is selectively applied to acquire both field ionization and field evaporation data, allowing for improved atomic composition and structure determination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional atom probe tomography is used to analyze specimens, then atomic composition can be determined, but the percentage of correctly identified atoms is low (less than 60%) and detection resolution is insufficient
Solution Approach 1:
The patent combines multiple imaging modes (field ionization imaging and field evaporation imaging) into a single atom probe microscope system. This merging allows the system to leverage the high spatial resolution of field ionization imaging and the atomic composition information from field evaporation imaging, thereby improving both measurement precision and reliability of atomic identification simultaneously
Solution Approach 2:
The atom probe microscope is designed to perform multiple functions: it can operate in field ionization imaging mode for high-resolution structural imaging, in field evaporation imaging mode for atomic composition analysis, and in combined modes. This multi-functionality enables the single instrument to achieve both high identification accuracy and high reliability across different operational modes
2Measurement precision
If systems are designed to improve atomic structure identification, then identification accuracy improves, but the systems become cumbersome and processing time extends
Solution Approach 1:
The system employs periodic alternation between field ionization imaging mode and field evaporation imaging mode during specimen analysis. By cycling between these modes in a structured sequence, the system efficiently collects both structural and compositional data without requiring separate lengthy analysis procedures, thus maintaining high identification accuracy while reducing overall processing time
Solution Approach 2:
The patent implements continuous data acquisition by seamlessly transitioning between different imaging modes without interrupting the analysis process. The atom probe microscope maintains continuous operation by alternating modes during a single experimental run, eliminating idle time and ensuring that useful data collection continues throughout the entire analysis period
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach increases the percentage of correctly identified atoms up to 100%, enhances spatial detection resolution, and reduces processing time, making the system more efficient and accurate for various specimen structures and compositions.
Implementation Method 1
electrical pulses are typically applied to the specimen so as to stimulate the specimen in a desired manner such that specimen atoms from a surface of the specimen being imaged are ionized and evaporated
Implementation Method 2
specimen atoms from a surface of the specimen being imaged are ionized and evaporated and projected to a detector
Data Source
AI summary
An imaging system that selectively alternates between a first, non-destructive imaging mode and a second, destructive imaging mode to analyze a specimen so as to determine an atomic structure and composition of the specimen is provided. The field ionization mode can be used to acquire first images of ionized atoms of an imaging gas present in a chamber having the specimen disposed therein, and the field evaporation mode can be used to acquire second images of ionized specimen atoms evaporated from a surface of the specimen with the imaging gas remaining in the chamber. The first and second image data can be analyzed in real time, during the specimen analysis, and results can be used to dynamically adjust operating parameters of the imaging system.