Atom Probe Tomography Alignment via Universal Sample Holder
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Solution Overview
Problem
Current analytical techniques face challenges in accurately specifying and analyzing crystal grain boundaries, particularly in microscopic areas smaller than 10 nm, due to limitations in spatial resolution and the difficulty in aligning observation areas across different analytical methods.
Innovation Solution
An analytical apparatus and method that combines atom probe technology with electron microscopy, using a sample holder and position adjustment system to ensure precise alignment and detection of ionized atoms, enabling the creation of accurate three-dimensional atom maps and association with crystal grain boundary data from TEM or STEM images.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If atom probe technology is used to achieve atomic-level resolution, then measurement precision is improved, but device complexity increases due to the need for composite analysis systems
Solution Approach 1:
The patent combines atom probe tomography (APT) and transmission electron microscopy (TEM) into a single composite analysis apparatus, merging the high-resolution imaging capability of TEM with the atomic-level compositional analysis of APT to achieve both structural and chemical characterization at the same location
Solution Approach 2:
The sample holder is designed with universal functionality to accommodate both APT needle-shaped samples and TEM observation, allowing the same sample to be analyzed by both techniques without requiring separate preparation or multiple sample holders
2Measurement precision
If TEM or STEM is used to achieve higher spatial resolution, then measurement precision is improved, but the ability to specify crystal grain boundaries in grain structures deteriorates
Solution Approach 1:
The patent merges TEM's high spatial resolution imaging capability with APT's ability to identify crystal grain boundaries through compositional analysis, allowing both functions to be performed on the same sample at the same location to overcome the limitations of using either technique alone
3Measurement precision
If composite analysis combining APT and TEM is performed, then analysis accuracy is improved, but the difficulty of aligning observation areas increases
Solution Approach 1:
The sample holder is designed with universal functionality to accommodate both APT needle-shaped samples and TEM observation, allowing the same sample to be analyzed by both techniques without requiring separate preparation or multiple sample holders, thereby simplifying alignment
Solution Approach 2:
The patent uses marker patterns and position information from TEM images to create a reference map that guides the alignment of APT observation areas, effectively copying spatial information from one technique to the other to facilitate precise alignment
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise specification and analysis of crystal grain boundaries, enhancing analysis accuracy and enabling detailed element analysis in fine structures by aligning observation areas across different analytical methods, thereby overcoming the limitations of spatial resolution and alignment issues.
Implementation Method 1
applies a high voltage of an order of several kV to 10 kV to a sample shaped in the form of a needle, to cause field evaporation of atoms themselves in a tip portion of the sample by a high electric field generated at the tip
Implementation Method 2
performs mass spectrometry of ions generated by the field evaporation to investigate a structure of the tip portion of the sample
Implementation Method 3
The ATP can simultaneously measure positions and species of atoms of a sample tip, and hence, the structure of the sample tip can three-dimensionally be reconstituted with an atomic resolution
Implementation Method 4
irradiates the sample with an electron beam to detect a secondary electron or a transmission electron, thereby inspecting a fine structure of the sample
Implementation Method 5
examples of the apparatus which detects the transmission electron include a transmission electron microscope (TEM) and a scanning transmission electron microscope (STEM)
Data Source
AI summary
In accordance with an embodiment, an analytical apparatus includes a member, a voltage source connected to the member and a detecting section. The member has an inserting portion into which a sample holder supporting a sample is insertable and whose shape corresponds to a shape of the sample holder. The detecting section is configured to detect a substance to be emitted from the sample by field evaporation. The shape of the inserting portion in a cross section of a direction perpendicular to an inserting direction of the sample holder is a shape excluding a perfect circle.