Atomic Diffusion Bonding for High Frequency Ultrasonic Transducers

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Solution Overview

Problem

Current high-frequency ultrasonic transducers face challenges in achieving reliable and consistent bonding of delay lines to piezoelectric elements, leading to issues with sensitivity, bandwidth, and mechanical stability, especially at high frequencies.

Innovation Solution

The implementation of an atomic diffusion bond between the delay line and the piezoelectric element, facilitated by interposing metal conductive layers, allows for efficient acoustic energy coupling and robust mechanical bonding, overcoming the limitations of traditional adhesive-based bonding methods.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If adhesive-based bonding is used to join delay line to piezoelectric element, then ease of manufacture is improved, but reliability and mechanical stability deteriorate at high frequencies

Engineering Contradiction:
Improveease of manufactureVSAvoidreliability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

A thin metal layer is introduced as an intermediary between the delay line and piezoelectric element. This metal layer serves dual purposes: it enables atomic diffusion bonding for reliable mechanical attachment while also functioning as a conductive layer for electrical connection, eliminating the need for separate adhesive and electrical connection layers.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces adhesive-based mechanical bonding with atomic diffusion bonding. This substitution eliminates the reliability issues associated with adhesives at high frequencies while maintaining ease of manufacture through a streamlined single-layer solution that combines structural and electrical functions.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Ease of manufacture

If adhesive layer is used for bonding, then ease of manufacture is improved, but acoustic energy coupling deteriorates

Engineering Contradiction:
Improveease of manufactureVSAvoidacoustic energy coupling
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The patent changes the material parameter of the bonding layer from adhesive (soft, compliant material) to thin metal layer (rigid, acoustically transparent material). This parameter change improves acoustic energy coupling between the delay line and piezoelectric element while maintaining ease of manufacture through the integrated bonding and conduction function.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If traditional bonding methods are used, then manufacturing process is simple, but manufacturing precision and consistency deteriorate

Engineering Contradiction:
Improvedevice complexityVSAvoidmanufacturing precision
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The patent merges the bonding function and electrical connection function into a single thin metal layer. This consolidation simplifies the manufacturing process by eliminating multiple bonding and wiring steps while simultaneously improving manufacturing precision and consistency through reduced process variability and better interfacial contact.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the transducer's performance by improving sensitivity, bandwidth, and mechanical stability, while also enabling cost-effective and consistent large-scale production of high-frequency ultrasonic transducers.

Implementation Method 1

The delay line and the piezoelectric element are joined by an atomic diffusion bond so that ultrasonic waves may be coupled from the piezoelectric element into the delay line or from the delay line into the piezoelectric element.

Methodology Applied
Scientific EffectAtomic diffusion bond: Diffusion Welding

Implementation Method 2

The ultrasonic stimulus waves can be either compressive or shear waves... an ultrasonic stimulus wave generator such as a piezoelectric element

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 3

the delay line includes a first and second section which forms an interface which is substantially perpendicular to the first direction; and the second section including a surface for coupling with a material to be investigated

Methodology Applied
Scientific EffectAcoustic wave transmission: Sound

Data Source

PatentUS12296361B2High frequency ultrasonic transducer and method of fabrication
Publication Date: 2025.05.13 BYK GARDNER
  • US12296361B2 patent drawing
  • US12296361B2 patent drawing
  • US12296361B2 patent drawing

AI summary

An ultrasonic transducer that includes a delay line, a piezoelectric element, and a metal conductive layer between the delay line and the piezoelectric element. The delay line and the piezoelectric element are acoustically joined with an atomic diffusion bond to facilitate coupling ultrasonic waves from the piezoelectric element into the delay line or from the delay line into the piezoelectric element.