Atomic Layer Nanoribbons via Selective Etching

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Solution Overview

Problem

Current methods lack efficient synthesis and fabrication approaches for atomically-thin transition metal dichalcogenides (TMD) ribbons and nanoribbons, which are crucial for harnessing their unique physical and chemical properties.

Innovation Solution

A method involving chemical vapor deposition (CVD) to form double atomic layer ribbons by depositing monolayers of TMD materials on a substrate, followed by partial removal to create atomic layer nanoribbons, utilizing precursor powders like molybdenum dioxide and sulfur to produce molybdenum disulfide, and subsequent UV-ozone treatment and etching to achieve the desired nanoribbon structure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional synthesis methods are used for TMD ribbons, then the fabrication process is simple, but the manufacturing precision and control over ribbon dimensions are insufficient

Engineering Contradiction:
Improvecontrol over ribbon dimensionsVSAvoidfabrication process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The fabrication process is segmented into distinct stages: forming double atomic layer ribbons via CVD, followed by selective removal of portions to create nanoribbons. This segmentation allows precise control over final dimensions while managing process complexity through modular steps.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Double atomic layer ribbons are formed in advance as a preliminary structure before the final nanoribbon configuration is achieved. This preliminary action enables better control over the final ribbon dimensions and properties.

Inventive Principle:
Principle #10Preliminary action

2Manufacturing precision

If double atomic layer ribbons are formed and partially removed to create nanoribbons, then the manufacturing precision and dimension control are improved, but the productivity and production efficiency decrease

Engineering Contradiction:
Improvenanoribbon dimension controlVSAvoidproduction efficiency
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

Instead of removing entire ribbons, only portions are removed to create the nanoribbon structure. This partial action maintains manufacturing precision while reducing material waste and improving production efficiency compared to complete removal and reformation.

Inventive Principle:
Principle #16Partial or excessive action

3Manufacturing precision

If CVD method with precursor powders is used, then the manufacturing precision and material purity are improved, but the use of energy and process time increase

Engineering Contradiction:
Improvematerial purityVSAvoidenergy consumption
Core Design Contradiction:
Manufacturing precisionVSUse of energy by moving object

Solution Approach 1:

The CVD process utilizes controlled parameter changes including temperature gradients and precursor ratios to achieve high material purity. By optimizing these parameters, the process maintains precision while managing energy consumption through efficient reaction conditions.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables the production of high-aspect-ratio TMD ribbons and nanoribbons with controlled dimensions, leveraging edge effects and confinement for enhanced properties, facilitating their practical applications.

Implementation Method 1

forming a double atomic layer ribbon comprising a first monolayer and a second monolayer positioned on a surface of the first monolayer

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Implementation Method 2

subsequent UV-ozone treatment and etching to achieve the desired nanoribbon structure

Methodology Applied
Scientific EffectPhoto-oxidation: Photo-oxidation

Data Source

PatentUS11408073B2Method for growth of atomic layer ribbons and nanoribbons of transition metal dichalcogenides
Publication Date: 2022.08.09 HONDA MOTOR CO LTD
  • US11408073B2 patent drawing
  • US11408073B2 patent drawing
  • US11408073B2 patent drawing

AI summary

A method of making an atomic layer nanoribbon that includes forming a double atomic layer ribbon having a first monolayer and a second monolayer on a surface of the first monolayer, wherein the first monolayer and the second monolayer each contains a transition metal dichalcogenide material, oxidizing at least a portion of the first monolayer to provide an oxidized portion, and removing the oxidized portion to provide an atomic layer nanoribbon of the transition metal dichalcogenide material. Also provided are double atomic layer ribbons, double atomic layer nanoribbons, and single atomic layer nanoribbons prepared according to the method.