Atomic Layer Ribbons via Moisture-Governed CVD

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current methods for synthesizing atomically-thin transition metal dichalcogenides (TMDs) in ribbon-like morphologies face challenges in achieving the desired properties due to limitations in controlling the growth of atomic layer ribbons and nanoribbons with specific dimensions and edge effects.

Innovation Solution

A method involving the formation of double atomic layer ribbons through chemical vapor deposition using precursor powders and a moisturized gas flow, followed by oxidation and etching to produce atomic layer nanoribbons, allowing for precise control over the structure and properties of TMD materials.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Shape

If conventional synthesis methods are used to produce TMD ribbons, then production is simpler, but the length-to-width ratio and edge effects are insufficient

Engineering Contradiction:
Improvelength-to-width ratioVSAvoidsynthesis process complexity
Core Design Contradiction:
ShapeVSDevice complexity

Solution Approach 1:

The synthesis process is segmented into distinct stages: initial ribbon formation followed by a second growth stage that extends specific regions. This segmentation allows control over the length-to-width ratio by selectively growing different parts of the ribbon structure at different times, resolving the contradiction between achieving high aspect ratios and maintaining process simplicity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The method employs preliminary patterning or selective nucleation before the main growth phase. By preparing the substrate or initial ribbon structure with specific features beforehand, the subsequent growth can be directed to achieve desired length-to-width ratios and prominent edge effects without requiring overly complex in-situ control mechanisms during growth.

Inventive Principle:
Principle #10Preliminary action

2Manufacturing precision

If conventional synthesis methods are used, then the process is easier to control, but manufacturing precision of atomic layer structure is insufficient

Engineering Contradiction:
Improveatomic layer controlVSAvoidprocess control difficulty
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

The invention introduces an intermediary substance or intermediate structure that facilitates precise atomic layer formation. This intermediary enables controlled layer-by-layer growth of TMD materials, achieving atomic layer precision while maintaining relatively simple process control through the mediating role of the intermediate element.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The method employs precise control of growth parameters such as temperature, pressure, and precursor flow rates to achieve atomic layer manufacturing precision. By systematically adjusting these parameters during different growth stages, the invention attains high precision in atomic layer structure while keeping the overall process manageable through established parameter optimization techniques.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If existing synthesis approaches are used, then production time is shorter, but the quality and properties of TMD nanoribbons are limited

Engineering Contradiction:
Improvematerial propertiesVSAvoidsynthesis speed
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The invention implements continuous growth processes where ribbon formation and pattern development occur in uninterrupted sequential stages. This continuity maintains high synthesis speed while ensuring consistent material quality and reliable properties, as the continuous action prevents defects that would arise from stopping and restarting the growth process.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The synthesis method employs periodic cycles of growth and modification stages. By alternating between rapid growth phases that maintain productivity and controlled modification phases that enhance material properties, the invention achieves both high synthesis speed and reliable TMD nanoribbon quality through rhythmic application of different growth conditions.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables the production of TMD ribbons and nanoribbons with enhanced properties, such as increased length-to-width ratios and prominent edge effects, facilitating unique applications by providing a controlled synthesis of atomically-thin TMD materials.

Implementation Method 1

forming the double atomic layer ribbon may comprise contacting two or more precursor powders with a gas having a certain moisture content

Methodology Applied
Scientific EffectChemical Vapour Deposition: Chemical Vapour Deposition

Implementation Method 2

contacting two or more precursor powders with a gas having a certain moisture content

Methodology Applied
Scientific EffectPhase Change: Phase Change

Data Source

PatentUS11981996B2Moisture governed growth method of atomic layer ribbons and nanoribbons of transition metal dichalcogenides
Publication Date: 2024.05.14 HONDA MOTOR CO LTD
  • US11981996B2 patent drawing
  • US11981996B2 patent drawing
  • US11981996B2 patent drawing

AI summary

A method of making an atomic layer nanoribbon that includes forming a double atomic layer ribbon having a first monolayer and a second monolayer on a surface of the first monolayer, wherein the first monolayer and the second monolayer each contains a transition metal dichalcogenide material, oxidizing at least a portion of the first monolayer to provide an oxidized portion, and removing the oxidized portion to provide an atomic layer nanoribbon of the transition metal dichalcogenide material. Also provided are double atomic layer ribbons, double atomic layer nanoribbons, and single atomic layer nanoribbons prepared according to the method.