Die-Sized Atomic Magnetometer Using Diamond Heat Spreader

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Solution Overview

Problem

Conventional atomic magnetometers are limited by their size and cost, restricting their commercial applications due to their bulkiness and high production expenses, necessitating the development of a die-sized atomic magnetometer that can be mass-produced in integrated circuit fabrication facilities.

Innovation Solution

A die-sized atomic magnetometer is designed with a semiconductor structure incorporating a heat spreader with high thermal conductivity, integrated photo detectors, and a vapor cell, utilizing diamond layers for efficient heat transfer and reduced magnetic interference, allowing for accurate measurement of the Larmor frequency using the Bell-Bloom or Mx techniques.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional atomic magnetometer designs are used, then measurement capability is achieved, but device size becomes large and cost becomes high

Engineering Contradiction:
Improvemagnetic field measurement capabilityVSAvoiddevice size
Core Design Contradiction:
Measurement precisionVSVolume of moving object

Solution Approach 1:

The magnetometer is divided into functionally independent integrated circuits: a first integrated circuit containing the VCSEL and associated optics, and a second integrated circuit containing photo detectors and signal processing electronics. This segmentation allows each component to be optimized and miniaturized independently while maintaining overall measurement capability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from a three-dimensional bulk optical cavity design to a two-dimensional planar integrated circuit architecture. The optical cavity is replaced with planar waveguides and resonant structures fabricated on semiconductor substrates, enabling miniaturization from millimeter-scale to micrometer-scale dimensions.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If conventional atomic magnetometer designs are used, then measurement capability is achieved, but manufacturing cost becomes high

Engineering Contradiction:
Improvemagnetic field measurement capabilityVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

Multiple functional components are merged into single integrated circuits: the VCSEL, optical waveguides, and control electronics are integrated on one chip; photo detectors, amplifiers, and signal processing are integrated on another chip. This merging enables mass production using standard semiconductor fabrication processes, dramatically reducing per-unit cost.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent replaces mechanical/optical components (bulk optical cavities, mirrors, lenses) with solid-state semiconductor structures (planar waveguides, resonant cavities, integrated photodetectors). This substitution enables fabrication using conventional semiconductor manufacturing techniques, reducing cost and improving scalability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Volume of moving object

If compact die-sized design is implemented, then device size is reduced, but signal-to-noise ratio may deteriorate

Engineering Contradiction:
Improvedevice sizeVSAvoidsignal-to-noise ratio
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

Parasitic magnetic signals and noise sources are extracted and isolated from the sensitive measurement region. Magnetic shielding structures are integrated around the vapor cell and electronic components, and noisy digital circuits are physically separated from the sensitive optical detection path, preserving signal-to-noise ratio in the compact design.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent employs composite material structures: semiconductor substrates with embedded magnetic shielding materials, multi-layer dielectric waveguides, and hybrid integration of different semiconductor materials (e.g., InGaAs photodetectors on InP substrates). These composite structures enable simultaneous achievement of miniaturization and optimized electromagnetic performance.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the production of compact, cost-effective atomic magnetometers with improved accuracy and reduced parasitic signal attenuation, enhancing the signal-to-noise ratio and enabling broader commercial applications.

Implementation Method 1

VCSEL 110 outputs light which is attenuated and circularly polarized by optics package 112

Methodology Applied
Scientific EffectLight emission from VCSEL: Light Emitting Diode

Implementation Method 2

The light output by VCSEL 110 is tuned to a frequency which, when circularly polarized, is absorbed by the single electrons in the outer shells of the alkali atoms

Methodology Applied
Scientific EffectLight absorption by alkali atoms: Absorption (EM radiation)

Implementation Method 3

When falling back, the electron emits a photon in a random direction

Methodology Applied
Scientific EffectPhoton emission from electron transitions: Fluorescence

Implementation Method 4

A die-sized atomic magnetometer is designed with a semiconductor structure incorporating a heat spreader with high thermal conductivity, integrated photo detectors, and a vapor cell, utilizing diamond layers for efficient heat transfer

Methodology Applied
Scientific EffectThermal conduction in diamond: Conduction (thermal)

Implementation Method 5

An atomic magnetometer is a device that measures the strength of a magnetic field by determining a frequency known as the Larmor frequency. The Larmor frequency, in turn, is the frequency of the magnetic moment of a contained group of in-phase spinning alkali atoms moving in precession in response to the magnetic field

Methodology Applied
Scientific EffectLarmor precession: Precession

Implementation Method 6

The additional energy at the Larmor frequency causes the electron to drop to a lower energy level that is associated with the outer shell where the electron can again absorb light energy

Methodology Applied
Scientific EffectResonant energy absorption: Resonance

Data Source

PatentUS10042009B2Die-sized atomic magnetometer and method of forming the magnetometer
Publication Date: 2018.08.07 NAT SEMICON CORP
  • US10042009B2 patent drawing
  • US10042009B2 patent drawing
  • US10042009B2 patent drawing

AI summary

The cost and size of an atomic magnetometer are reduced by attaching together a first die which integrates together a vapor cell, top and side photo detectors, and processing electronics, a second die which integrates together an optics package and a heater for the vapor cell, and a third die which integrates together a VCSEL, a heater for the VCSEL, and control electronics.