Atomic Probe Tip Shape Correction via Mass Spectrometry Ratio

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Solution Overview

Problem

Atomic probe devices face challenges in accurately analyzing the structure of samples with distorted tip shapes due to uneven evaporation fields and laser irradiation, leading to deformation and inaccurate three-dimensional reconstruction.

Innovation Solution

A sample analyzer and analysis method that includes a voltage source, laser irradiation unit, and detection unit, which corrects analysis information by calculating a ratio between model and analysis data to account for tip shape distortions, ensuring accurate reconstruction of the sample's structure even when the tip shape is deformed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a high voltage is applied to a needle-like sharpened sample to perform mass spectrometry of ions field-evaporating from the tip portion, then material specification is achieved, but the tip shape becomes distorted from hemispherical due to uneven evaporation fields

Engineering Contradiction:
Improvematerial specification accuracyVSAvoidtip shape uniformity
Core Design Contradiction:
Measurement precisionVSShape

Solution Approach 1:

The patent applies preliminary anti-action by pre-correcting the analysis information using a correction value calculated from the difference between the actual tip shape and the ideal hemispherical shape. This correction is applied before final analysis to counteract the distortion effects, allowing accurate material specification even when the tip shape is non-hemispherical

Inventive Principle:
Principle #9Preliminary anti-action

2Adaptability or versatility

If a laser beam is used to induce field evaporation at the tip portion, then three-dimensional structure analysis is enabled, but the tip shape distorts due to localized irradiation effects

Engineering Contradiction:
Improvethree-dimensional analysis capabilityVSAvoidtip shape uniformity
Core Design Contradiction:
Adaptability or versatilityVSShape

Solution Approach 1:

The patent employs feedback by calculating a correction value based on the actual tip shape (obtained through imaging) and using this correction to adjust the analysis information. This closed-loop approach continuously compensates for shape-induced errors, enabling accurate 3D structure analysis despite laser-induced distortions

Inventive Principle:
Principle #23Feedback

3Loss of information

If mass spectrometry is performed on ions field-evaporating from the tip portion, then material identification is achieved, but analysis accuracy decreases when tip shape is distorted

Engineering Contradiction:
Improvematerial analysis accuracyVSAvoidtip shape uniformity
Core Design Contradiction:
Loss of informationVSShape

Solution Approach 1:

The patent applies parameter changes by modifying the analysis information through a correction value that accounts for tip shape deviations. This transformation adjusts the mass spectrometry data to compensate for geometric distortions, restoring analysis accuracy even when the tip shape is non-ideal

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate analysis of sample structures at the atomic level by correcting for distortions, allowing for precise material identification and structure reconstruction even when the tip shape is not hemispherical.

Implementation Method 1

The atomic probe device can specify the material of a sample by applying a high voltage to a needle-like sharpened sample and performing mass spectrometry of ions field-evaporating from the tip portion of the sample

Methodology Applied
Scientific EffectField evaporation:

Implementation Method 2

A laser atomic probe device can induce field evaporation by irradiating the tip portion of a sample with a laser beam

Methodology Applied
Scientific EffectLaser irradiation: Laser

Implementation Method 3

performing mass spectrometry of ions field-evaporating from the tip portion of the sample

Methodology Applied
Scientific EffectMass spectrometry:

Data Source

PatentUS11043369B2Sample analyzer and sample analysis method
Publication Date: 2021.06.22 KIOXIA CORP
  • US11043369B2 patent drawing
  • US11043369B2 patent drawing
  • US11043369B2 patent drawing

AI summary

A sample analyzer includes a voltage source that applies a voltage to a sample. A laser irradiator irradiates the sample with a laser beam. A detector detects a particle emitted from the sample. An operation device specifies the material of the particle detected by the detection device, by mass spectrometry of the particle and analyzes the structure of the sample. The operation device calculates a ratio in structure between model information indicating the structure of the sample, which is prepared in advance, and analysis information indicating the structure of the sample, which is obtained by the mass spectrometry, and applies the ratio to the analysis information so as to correct the analysis information.