Atomically Thin Spatial Light Modulator for Fast Beam Steering

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Solution Overview

Problem

Existing optical devices struggle with achieving fast, continuous tunability of multiple independent channels for spatial light modulation, which is essential for advanced optical systems and applications.

Innovation Solution

The development of a continuously tunable, atomically thin optical device based on phase profile modulation in field-effect transistors composed of two-dimensional van der Waals materials, specifically using a MoSe2 monolayer with graphene split-gate geometry to control exciton resonance and modulate the wavefront phase profile.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional optical devices are used for spatial light modulation, then device structure and materials are established, but fast continuous tunability of multiple independent channels cannot be achieved

Engineering Contradiction:
Improvecontinuous tunabilityVSAvoiddevice structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent changes the optical properties of the semiconductor layer by applying electrostatic fields through gate electrodes, which continuously tunes the exciton resonance wavelength and thereby modulates the phase profile of reflected light. This parameter-based control enables fast, continuous spatial light modulation without mechanical moving parts.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention replaces conventional mechanical or bulk optical modulation mechanisms with an electrostatic field-based system using atomically thin semiconductor layers. The gate electrodes apply electric fields to directly modulate the optical phase, eliminating the need for mechanical actuators or complex optical path changes.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Productivity

If atomically thin semiconductor layer with electrostatic gating is used, then fast switching and continuous tunability are achieved, but device fabrication complexity increases

Engineering Contradiction:
Improveswitching speedVSAvoidfabrication process
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The device structure is segmented into distinct functional layers: gate electrodes, insulating layers, atomically thin semiconductor layer, and substrate. This segmentation allows independent optimization and fabrication of each component using specialized techniques such as chemical vapor deposition for the semiconductor and standard semiconductor processing for the gates and insulators.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs a composite structure combining atomically thin semiconductor materials (e.g., MoSe2, WSe2) with conventional insulating materials and metal electrodes. This composite approach leverages the unique optical properties of 2D semiconductors while using well-established materials and fabrication techniques for the supporting structure, making the device manufacturable.

Inventive Principle:
Principle #40Composite materials

3Adaptability or versatility

If MoSe2 monolayer with graphene split-gate geometry is used, then beam deflection range of 10° and switching times of 1.6 nanoseconds are achieved, but device structure becomes more complex

Engineering Contradiction:
Improvebeam steering capabilityVSAvoidgate electrode structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The split-gate geometry creates locally different electrostatic field distributions across the semiconductor layer, enabling spatially selective phase modulation. By applying different voltages to different gate segments, the device can independently control phase profiles in different regions, achieving two-dimensional beam steering and multiple independent modulation channels.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The invention transitions from one-dimensional linear gates to two-dimensional split-gate arrays, enabling control of phase profiles in multiple spatial dimensions. This dimensional enhancement allows independent modulation of multiple beam parameters simultaneously, achieving complex beam steering patterns and two-dimensional spatial light modulation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables fast, continuously tunable beam deflection with a range of 10°, two-dimensional beam steering, and switching times down to 1.6 nanoseconds, opening possibilities for new optical systems and applications.

Implementation Method 1

the semiconductor having an electric field-dependent resonance wavelength

Methodology Applied
Scientific EffectExciton resonance:

Implementation Method 2

an electrostatic field in each of the at least two regions being independently controllable by application of voltage to the first and the second groups of gate electrodes

Methodology Applied
Scientific EffectElectrostatic field effect: Electric Field

Implementation Method 3

phase profile modulation in field-effect transistors composed of two-dimensional van der Waals materials

Methodology Applied
Scientific EffectPhase profile modulation: Phase Modulation

Implementation Method 4

enables fast, continuously tunable beam deflection with a range of 10°, two-dimensional beam steering

Methodology Applied
Scientific EffectBeam deflection:

Data Source

PatentUS12218268B2Fast spatial light modulator based on atomically thin reflector
Publication Date: 2025.02.04 PRESIDENT & FELLOWS OF HARVARD COLLEGE
  • US12218268B2 patent drawing
  • US12218268B2 patent drawing
  • US12218268B2 patent drawing

AI summary

An optical device useful for spatial light modulation. The device comprises: a semiconductor layer having a first surface and a second surface, the semiconductor having an electric field-dependent resonance wavelength; a first electrode electrically connected to the semiconductor layer; a first insulating layer adjacent to the first surface of the semiconductor layer, and a second insulating layer adjacent to the second surface of the semiconducting layer, the first and the second insulating layers each being optically transparent at the resonance wavelength; a first group of at least one gate electrodes disposed adjacent to the first insulating layer, and a second group of at least one gate electrodes disposed adjacent to the second insulating layer, each gate electrode being at least 80% optically transparent at the resonance wavelength; wherein the first and the second groups of gate electrodes, taken together, form at least two regions in the semiconductor layer, an electrostatic field in each of the at least two regions being independently controllable by application of voltage to the first and the second groups of gate electrodes, the at least two regions abutting each other along at least one boundary.