ATV Transfer Module Layout for Reduced Tool Footprint
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Solution Overview
Problem
The existing substrate processing systems face challenges in maximizing tool density within fabrication rooms due to constrained dimensions and configurations, leading to inefficient use of space and reduced processing capacity.
Innovation Solution
The implementation of a modified atmosphere-to-vacuum (ATV) transfer module with a transfer robot assembly that allows load locks to be partially or fully located within the equipment front end module (EFEM), reducing the overall footprint and increasing pitch, thereby enabling a more compact and efficient substrate processing tool configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If load locks are located outside the EFEM in conventional configurations, then the transfer robot has sufficient space to operate, but the overall footprint of the substrate processing tool is large, reducing tool density
Solution Approach 1:
The load locks are nested within the interior volume of the EFEM, with at least approximately 30-70% of the load lock volume located inside the EFEM boundaries. This nesting arrangement allows the transfer robot to access load locks through the second side of the EFEM while maintaining a compact overall footprint, as the load locks occupy space that would otherwise be unused interior volume.
Solution Approach 2:
The transfer robot assembly is configured to operate in multiple dimensions: it can raise and lower the transfer robot platform vertically, adjust position horizontally, and fold the robot arm into a compact configuration. This multi-dimensional movement capability allows the robot to access load locks positioned at different locations and orientations within the compact EFEM footprint.
2Productivity
If the transfer robot assembly is made compact to reduce footprint, then tool density increases, but the robot's ability to access and transfer substrates may be compromised
Solution Approach 1:
The transfer robot assembly incorporates dynamic movement capabilities including vertical raising and lowering of the transfer robot platform, horizontal position adjustment, and folding of the robot arm into a compact configuration. These dynamic features allow the robot to transition between a compact stored state and an extended operational state, maintaining substrate transfer capability while reducing footprint when not in use.
Solution Approach 2:
The transfer robot arm is segmented into multiple sections that can fold relative to each other, allowing the arm to collapse into a narrow profile occupying less than 50% of the EFEM depth when folded. This segmentation enables the robot to access substrates in load locks while maintaining a compact overall configuration.
Data Source
Figure 1~2A
Figure 2B~2D
Figure 3A~3B
AI summary
An atmosphere-to-vacuum (ATV) transfer module for a substrate processing tool includes a first side configured to interface with at least one loading station, a transfer robot assembly arranged within the ATV transfer module, and a second side opposite the first side. The transfer robot assembly is configured to transfer substrates between the at least one loading station and at least one load lock arranged between the ATV transfer module and a vacuum transfer module (VTM). The second side is configured to interface with the at least one load lock. The transfer robot assembly is arranged adjacent to the second side, and the at least one load lock extends through the second side into an interior volume of the ATV transfer module.