Audio Frequency Signal Analysis for Semiconductor Component Status Detection

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Solution Overview

Problem

The subjective nature of human auditory inspection for detecting the operational status of semiconductor equipment components, particularly in determining aging or wear, leads to inconsistent results due to individual variations in sound perception and reduced sensitivity to frequencies above 1 kHz.

Innovation Solution

An apparatus comprising an audio frequency signal receiving unit and an analysis and determination unit, which analyzes audio frequency signals generated by semiconductor equipment to objectively assess component statuses using mel-frequency cepstrum coefficients and linear discrimination analysis, building a database of reference audio frequency characteristics to compare with real-time signals for determining abnormal states.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If an engineer uses visual inspection or listening to sound to check component statuses, then the inspection process is simple and requires no special tools, but the determination is subjective and inconsistent due to individual variations in sound perception

Engineering Contradiction:

Improveinspection process simplicityVSAvoidcomponent status determination accuracy

Core Design Contradiction:

Ease of operationVSMeasurement precision

Solution Approach 1:

The patent replaces the human auditory system with an automated audio frequency signal receiving unit and analysis system. The receiving unit captures sounds from semiconductor equipment, and the analysis unit processes these signals objectively using mel-frequency cepstrum coefficients and linear discrimination analysis, eliminating subjective human perception variations while maintaining operational simplicity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces an intermediary analysis unit that acts as a mediator between the sound source (semiconductor equipment) and the inspector (engineer). This intermediary objectively analyzes audio frequency signals and provides standardized component status determinations, bridging the gap between simple sound-based inspection and precise, consistent measurements.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Device complexity

If an engineer relies on human hearing to detect component aging or wear, then no additional equipment is needed, but sensitivity is reduced for frequencies greater than 1 kHz leading to missed detections

Engineering Contradiction:

Improveequipment requirementVSAvoiddetection sensitivity

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The patent substitutes the human auditory system with an electronic audio frequency signal receiving unit and analysis system that can detect a broader frequency range with higher sensitivity. The analysis unit uses mel-frequency cepstrum coefficients to accurately process sounds across all frequency ranges, including those above 1 kHz that humans cannot reliably detect, thereby improving reliability without significantly increasing device complexity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If multiple engineers perform auditory inspections, then coverage and expertise vary, but the results are inconsistent due to unique individual sensations and experiences

Engineering Contradiction:

Improveengineering expertise utilizationVSAvoidinspection result consistency

Core Design Contradiction:

Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The patent introduces an intermediary analysis unit that standardizes the inspection process by objectively analyzing audio frequency signals using consistent algorithms (mel-frequency cepstrum coefficients and linear discrimination analysis). This intermediary ensures that all engineers receive the same standardized results regardless of their individual expertise or sensory variations, maintaining both adaptability and consistency.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent transforms the inspection process from subjective human perception to objective parameter-based analysis. By converting sound signals into measurable parameters (audio frequency characteristics, mel-frequency cepstrum coefficients), the system enables consistent, repeatable measurements that are independent of individual engineer variations while preserving the ability to handle diverse inspection scenarios.

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS8255178B2Method for detecting statuses of components of semiconductor equipment and associated apparatus

Publication Date: 2012.08.28 MICRON TECHNOLOGY INC

AI summary

An apparatus for detecting an operational status of a semiconductor equipment includes an audio frequency signal receiving unit and an analysis and determination unit. The audio frequency signal receiving unit is used for receiving an audio frequency signal from the semiconductor equipment while the semiconductor equipment is working. The analysis and determination unit is used for analyzing the audio frequency signal to determine statuses of components of the semiconductor equipment.