Audio MEMS Mirror Feedback via Acoustic Detection
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Solution Overview
Problem
Existing MEMS mirror systems face challenges in accurately determining the phase and frequency of mirror oscillations, leading to issues like image tearing and ghosting, especially in compact and cost-sensitive optical imaging systems, where traditional methods are impractical or expensive.
Innovation Solution
An audio feedback system for MEMS mirrors, which includes a microphone to detect mirror oscillations, a mirror driver system to find the near-resonant frequency, and a video controller system to control the laser output, ensuring proper phase and frequency alignment for raster scanning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional optical feedback sensors are placed at or near the image plane to detect mirror oscillations, then frequency and phase information can be obtained, but the system becomes impractical for compact optical imaging systems and increases device complexity
Solution Approach 1:
The patent replaces the traditional optical feedback sensor system with an acoustic sensing system. A microphone detects acoustic waves generated by mirror oscillations, converting mechanical vibrations into audible frequency ranges for processing. This substitution eliminates the need for complex optical sensors at the image plane while maintaining detection accuracy.
Solution Approach 2:
The patent introduces acoustic waves as an intermediary medium between the oscillating mirror and the detection system. The mirror's mechanical oscillations generate acoustic waves in the surrounding medium, which are then captured by a microphone. This intermediary approach allows indirect detection of mirror position without requiring direct optical sensing at the image plane.
2Measurement precision
If piezo resistive material is implanted into the hinge regions of the mirror structure to detect mirror position, then frequency and phase information can be obtained, but the mirror structure becomes encumbered with sensors and metal lines, increasing manufacturing complexity and potential wear
Solution Approach 1:
The patent extracts the sensing function from the mirror structure itself and places it externally. Instead of implanting piezo resistive material into the hinge regions, the system uses an external microphone to detect acoustic waves generated by mirror oscillations. This separation eliminates the need to modify the mirror structure with sensors and metal lines.
Solution Approach 2:
The patent replaces the piezo resistive sensing method with acoustic wave detection. Instead of measuring electrical resistance changes in implanted materials, the system detects mechanical vibrations through acoustic waves in the surrounding medium, simplifying the mirror structure and manufacturing process.
3Measurement precision
If additional optical processing and space are allocated to sense mirror position from the backside of the MEMS mirror, then frequency and phase information can be obtained, but the system size and expense increase
Solution Approach 1:
The patent replaces optical sensing methods with acoustic wave detection. Instead of using optical systems to sense mirror position from the backside, the system uses a microphone to detect acoustic waves generated by mirror oscillations. This substitution reduces the required system volume and eliminates complex optical processing requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides a robust, cost-effective, and compact MEMS mirror system that maintains image quality by accurately controlling the mirror oscillations, reducing image tearing and ghosting effects while minimizing system complexity and expense.
Implementation Method 1
the mirror oscillation generates an acoustic wave that is detected by a microphone
Implementation Method 2
the light reflected from the MEMS mirror may be detected by sensors located at or near the photosensitive media
Data Source
AI summary
A mirror device and a method for audio feedback of a MEMS mirror device are presented. The mirror device includes a mirror with a reflective surface located to intercept a modulated beam of light produced by a laser. The mirror oscillates on a hinge axis structure A microphone detects the mirror oscillation information. The mirror device further includes a mirror driver system and a video controller system. The mirror driver system causes the mirror to rotate about the hinge axis structure. The video controller system uses the information received from the microphone, and the information received from the mirror-driver controller, to control the output of the laser.