Auger Electron Microscope Chemical State Correction
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Solution Overview
Problem
Existing Auger electron microscope analysis methods face challenges in accurately determining element concentrations due to variations in peak intensity caused by changes in chemical state and superimposed peaks, requiring curve fitting calculations with standard spectra measured under identical conditions, which can be impractical and limited by differing measurement conditions.
Innovation Solution
An Auger electron microscope system that includes a processing unit capable of calculating pseudo standard Auger spectra under test specimen measurement conditions by correcting peak intensities based on acceleration voltage and specimen tilt angle conditions, allowing curve fitting calculations even when standard and test spectra are measured under different conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If standard Auger spectra are measured under the same measurement conditions as test specimens, then quantitative analysis accuracy is improved, but measurement flexibility and ease of operation deteriorate
Solution Approach 1:
The patent applies parameter changes by introducing correction coefficients for acceleration voltage and specimen tilt angle. Instead of requiring identical measurement conditions, the system measures standard spectra under reference conditions and applies mathematical corrections to adapt them to test specimen conditions. This resolves the contradiction by maintaining quantitative accuracy through parameter correction while enabling measurement flexibility through different measurement conditions.
Solution Approach 2:
The patent uses copying by creating corrected standard spectra that represent what the standard spectra would look like under test specimen measurement conditions. The correction process generates virtual standard spectra adapted to different conditions without requiring actual remeasurement, thus maintaining accuracy while improving operational flexibility.
2Productivity
If peak intensity is used for quantitative analysis, then analysis speed is improved, but measurement precision deteriorates due to sensitivity to chemical state changes
Solution Approach 1:
The patent replaces the mechanical approach of directly using peak intensity with a computational approach using curve fitting calculation. Instead of relying on simple peak intensity ratios that are sensitive to chemical state changes, the system performs spectral decomposition and fitting against corrected standard spectra, maintaining analysis speed while improving precision through more robust mathematical analysis.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate quantitative analysis by correcting peak intensities and performing curve fitting calculations regardless of differing measurement conditions, improving the reliability and flexibility of element concentration determination.
Implementation Method 1
a measuring unit that performs measurement by Auger electron spectroscopy
Data Source
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AI summary
An Auger electron microscope (100) includes a processing unit (210), and the processing unit (210) performs processing of: acquiring an actually measured Auger spectrum obtained by measuring a test specimen (S) containing an analysis target element; acquiring a plurality of first standard Auger spectra obtained by measuring a plurality of standard specimens each containing the same analysis target element but in different chemical states; calculating, based on a test specimen measurement condition that is a measurement condition when the test specimen (S) has been measured and a standard specimen measurement condition that is a measurement condition when the standard specimens have been measured, a plurality of second standard Auger spectra under the test specimen measurement condition from the plurality of first standard Auger spectra; and performing curve fitting calculation of the actually measured Auger spectrum by using the plurality of calculated second standard Auger spectra.