Autoencoder Spectral Anomaly Mapping for Fast Sample Inspection

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Solution Overview

Problem

Existing quality-control methods in scientific instruments, such as electron microscopes, are time-intensive due to low signal-to-noise ratios in spectroscopic data, necessitating lengthy signal processing like PCA, which are not effective for nonlinear effects, leading to delayed identification of sample anomalies.

Innovation Solution

Implementing a variational autoencoder with a neural network to learn the underlying statistics of spectroscopic data and project it into a lower-dimensional latent space, allowing real-time identification of chemical or structural anomalies by clustering similar spectra, thereby highlighting problem spots in the sample.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional signal processing methods like PCA are used to analyze spectroscopic data, then measurement precision can be maintained, but the processing time increases significantly from seconds to hours

Engineering Contradiction:
Improveanomaly detection accuracyVSAvoidquality control processing time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces traditional mechanical/mathematical signal processing methods (PCA, Fourier transforms) with a neural network-based deep learning system. The neural network is trained offline to learn complex patterns in spectroscopic data, then performs rapid online inference that maintains anomaly detection accuracy while reducing processing time from hours to seconds.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The neural network is trained in advance on a large dataset of spectroscopic spectra before deployment. This preliminary training phase allows the model to learn underlying patterns and relationships, so that during actual quality control operations, anomaly detection can be performed rapidly without extensive real-time computation.

Inventive Principle:
Principle #10Preliminary action

2Productivity

If traditional linear processing methods are applied to spectroscopic data, then processing speed can be maintained, but effectiveness decreases for nonlinear effects and complex patterns

Engineering Contradiction:
Improveprocessing speedVSAvoidanomaly detection effectiveness
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent replaces linear mathematical processing methods with a nonlinear neural network system capable of capturing complex patterns and interactions in spectroscopic data. The neural network's ability to model nonlinear relationships maintains high processing speed while significantly improving anomaly detection effectiveness for complex samples.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs a composite approach combining multiple neural network layers with different functions (convolutional layers, fully connected layers, activation functions) to process spectroscopic data. This composite architecture enables the system to capture both local and global patterns in the data, maintaining speed while improving detection reliability.

Inventive Principle:
Principle #40Composite materials

Data Source

PatentUS12553841B2Deep learning techniques for fast anomaly detection in experimental data
Publication Date: 2026.02.17 FEI CO
  • US12553841B2 patent drawing
  • US12553841B2 patent drawing
  • US12553841B2 patent drawing

AI summary

Disclosed herein are scientific instrument support systems, as well as related methods, apparatus, computing devices, and computer-readable media. Some embodiments provide a scientific instrument including detectors supporting one or more spectroscopic modalities and an imaging modality and further including an electronic controller configured to process streams of measurements received from the detectors. The electronic controller operates to generate a base image of the sample based on the measurements corresponding to the imaging modality and further operates to generate an anomaly map of the sample based on the base image and further based on differences between measured and autoencoder-reconstructed spectra corresponding to different pixels of the base image. In at least some instances, the anomaly map can beneficially be used in a quality-control procedure to identify, within seconds, specific problem spots in the sample for more-detailed inspection and/or analyses.