Automated Monocrystalline Silicon Bar Cleaning With Spray-Scrub-Air Jets

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Solution Overview

Problem

The manual scrubbing of monocrystalline silicon bars is inefficient and costly, failing to meet the high-quality and high-efficiency requirements of large-area ultra-thin silicon wafer production, necessitating the development of automated cleaning devices.

Innovation Solution

A device comprising a base frame with sprayers, scrubbers, and air-jetters for automated cleaning, including a transmission assembly, sensor light source, and blade for effective removal of impurities and glue particles on the silicon bar surface.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If manual scrubbing is used to clean monocrystalline silicon bars, then labor flexibility is maintained, but cleaning efficiency is low and labor cost is high

Engineering Contradiction:

Improvecleaning efficiencyVSAvoidmanual operation level

Core Design Contradiction:

ProductivityVSExtent of automation

Solution Approach 1:

The patent replaces manual mechanical scrubbing with an automated cleaning system comprising sprayers for liquid application, scrubbers for mechanical cleaning, and air-jetters for drying. This substitution eliminates manual labor while maintaining effective cleaning through coordinated automated components.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The cleaning device is designed to automatically clean silicon bars as they pass through the transmission assembly, requiring minimal human intervention. The system self-regulates through sensor light sources that detect bar presence and trigger appropriate cleaning actions, enabling autonomous operation.

Inventive Principle:

Principle #25Self-service

2Productivity

If automated cleaning devices are implemented, then cleaning efficiency increases and labor cost decreases, but device complexity increases

Engineering Contradiction:

Improvescrubbing efficiencyVSAvoidsystem structure complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The cleaning system is divided into distinct functional modules: sprayers for liquid application, scrubbers for mechanical cleaning, air-jetters for drying, and sensor light sources for detection. Each module operates independently but coordinates through the transmission assembly, making the complex system manageable and maintainable.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The base frame structure serves multiple functions: it supports the transmission assembly, houses the sprayers, scrubbers, and air-jetters, and provides structural stability. This multi-functionality reduces the need for separate support structures, thereby limiting the increase in overall device complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Manufacturing precision

If multiple cleaning components are used, then impurity removal effectiveness improves, but the risk of surface damage increases

Engineering Contradiction:

Improvesurface cleanlinessVSAvoidsurface damage risk

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The cleaning process operates in sequential periodic stages: liquid spraying, mechanical scrubbing, and air-jetting drying. Each stage performs a specific cleaning function, and the transmission assembly controls the timing and progression of each stage to ensure complete cleaning without excessive mechanical stress on the silicon bar surface.

Inventive Principle:

Principle #19Periodic action

Solution Approach 2:

Liquid from the sprayers acts as an intermediary medium that softens and loosens impurities before the scrubbers apply mechanical force. This intermediate liquid treatment reduces the direct mechanical stress between scrubbers and the silicon bar surface, minimizing the risk of surface damage while maintaining effective impurity removal.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances scrubbing efficiency and reduces labor costs by effectively removing impurities without damaging the silicon bar surface, improving cutting accuracy and wafer quality while meeting increased production demands.

Implementation Method 1

The sprayer is configured to spray the monocrystalline silicon bar

Methodology Applied

Scientific EffectSpray: Fluid Spray

Implementation Method 2

The scrubber is configured to scrub the monocrystalline silicon bar

Methodology Applied

Scientific EffectFriction: Friction

Implementation Method 3

The air-jetter is configured to purge the monocrystalline silicon bar

Methodology Applied

Scientific EffectJet: Jet

Data Source

PatentUS12403511B2Devices for automatic cleaning of a monocrystalline silicon bar

Publication Date: 2025.09.02 TIANJIN ZHONGHUAN SEMICON CO LTD

AI summary

Provided are automatic cleaning devices for a monocrystalline silicon bar, which include a base frame, a sprayer, a scrubber, and an air-jetter. Bottom of an inner side of the base frame is configured to place a monocrystalline silicon bar. A plurality of groups of the sprayers, a plurality of groups of the scrubbers, and a plurality of groups of the air-jetters are all disposed on side walls and a top surface of the base frame whose bottom of an inner side is removed. The sprayer is configured to spray the monocrystalline silicon bar. The scrubber is configured to scrub the monocrystalline silicon bar. The air-jetter is configured to purge the monocrystalline silicon bar.