Automated Passive Voltage Contrast Test Using CAD Data
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Solution Overview
Problem
Passive voltage contrast tests for semiconductor devices are labor-intensive due to the manual examination of dots in images, which hampers efficient fault detection.
Innovation Solution
Digitizing passive voltage contrast images and comparing them to computer-aided design (CAD) data to automate the identification of grounded or floating circuit nodes, reducing the time required for fault analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual examination of dots in passive voltage contrast images is performed, then identification of circuit nodes can be completed, but the process becomes tremendously labor intensive and time consuming
Solution Approach 1:
The patent replaces the manual mechanical examination process with an automated image processing system. The system uses computer algorithms to automatically identify dots in passive voltage contrast images, extract their coordinates, and determine their electrical states by comparing with CAD data, thereby eliminating the need for manual inspection while maintaining or improving identification accuracy.
Solution Approach 2:
The patent creates a digital copy of the physical dot pattern from the passive voltage contrast image through automated image processing. By extracting coordinates and creating a digital representation that can be compared with CAD layouts, the system enables automated analysis without requiring manual transcription or examination of each dot.
2Productivity
If automated image processing is implemented, then examination time is reduced, but system complexity increases
Solution Approach 1:
The patent implements a multi-functional automated system that performs multiple tasks: capturing or importing passive voltage contrast images, processing images to identify dots and extract coordinates, retrieving CAD data, comparing actual versus expected states, and generating test results. This universal system handles the entire test workflow, reducing overall system complexity despite the automation of multiple functions.
Data Source
AI summary
The time required to perform a passive voltage contrast test of an area of interest of a layer of interest is substantially reduced by digitizing a passive voltage contrast image to form contrast data that represents the image, and comparing the contrast data to computer aided design (CAD) data that defines the semiconductor device.