Automated Track Pattern Generation for Non-Uniform IC Designs
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Solution Overview
Problem
Current methods for generating non-uniform, colored, and design rule correct track patterns in integrated circuit designs are complex and often require precompiled pattern libraries, especially at process nodes below 10 nm, where complex constraints and multiple patterning processes necessitate automated solutions that are not efficiently addressed by existing technologies.
Innovation Solution
A methodology for automatically generating track patterns that satisfy design and process rules, including identifying starting points, filling gaps between tracks, and replicating patterns to conform to user-defined inputs and constraints, using EDA tools adapted to handle complex color-based track systems with irregular spacing and widths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If precompiled pattern libraries are used for generating track patterns, then manufacturing precision can be maintained, but device complexity increases due to the need to manage and select from complex pattern libraries
Solution Approach 1:
The system performs self-service by automatically generating track patterns through algorithms that evaluate design rules and constraints directly, eliminating the need for external precompiled pattern libraries. The automated generation process inherently ensures manufacturing precision while reducing the complexity of pattern library management.
Solution Approach 2:
The patent replaces the mechanical system of manually managing and selecting from precompiled pattern libraries with an automated computational system. The EDA tool uses algorithms to generate track patterns automatically, substituting the manual mechanical process with an automated intellectual process that reduces complexity while maintaining precision.
2Productivity
If automated track pattern generation is implemented, then productivity increases through automation, but device complexity increases due to the need for sophisticated EDA tools and algorithms
Solution Approach 1:
The EDA tool is designed with multi-functionality, serving both as a general-purpose design tool and as an automated track pattern generator. By integrating track pattern generation capabilities into the existing EDA workflow, the system achieves productivity improvement without requiring a completely separate complex system, thus managing device complexity more effectively.
Solution Approach 2:
The patent merges the track pattern generation function with the existing EDA tool suite. Rather than creating a standalone complex system, the automated generation capability is integrated into the familiar EDA environment, combining multiple functions into a unified tool that improves productivity while managing complexity through integration.
3Manufacturing precision
If complex constraints and multiple patterning processes are enforced, then manufacturing precision is maintained, but ease of operation decreases due to the increased number of constraints to manage
Solution Approach 1:
The system performs self-service by automatically evaluating and enforcing design rules and constraints during the automated track pattern generation process. The EDA tool inherently checks compliance with multiple patterning requirements and design rules, maintaining manufacturing precision while eliminating the manual burden of managing complex constraints, thus improving ease of operation.
Data Source
AI summary
Embodiments according to the present disclosure relate to physically implementing an integrated circuit design while conforming to the requirements of complex color based track systems. In embodiments, the color based track systems can include irregularly spaced and non-uniform width colored tracks. These and other embodiments include a methodology to automatically generate a track pattern for an integrated circuit design that satisfies both design constraints and user inputs. Various alternatives for identifying starting points in the design for automatically generating track patterns are possible.