Automated Wet-Processing Lab for 24/7 Semiconductor Handling
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Solution Overview
Problem
Existing wet laboratories for scientific research are inefficient, unstable, costly, and pose safety hazards due to manual operations, and lack automated data collection and management.
Innovation Solution
A fully automated wet-processing dark laboratory system comprising a laboratory body, wet-processing equipment, transfer robot, sample and chemical supplying and storing apparatus, and control apparatus, enabling 24/7 operation without human presence.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If manual operations are used in wet laboratories forscientific research, then flexibility in research scenarios is improved, but efficiency, reliability, and safety deteriorate
Solution Approach 1:
The system enables automated self-service operations where the robotic arm autonomously performs sample transfer, chemical replenishment, and equipment operation without human intervention. The control system automatically schedules and executes experimental protocols, ensuring consistent and reliable results while maintaining research flexibility through programmable workflows.
2Ease of operation
If manual operations are used in wet laboratories, then operational simplicity is improved, but safety and cost efficiency deteriorate
Solution Approach 1:
The system extracts human operators from the hazardous wet laboratory environment and replaces them with an automated robotic system. The robotic arm performs all operations involving chemicals and samples, completely eliminating personnel exposure to safety hazards while maintaining ease of operation through centralized control interfaces.
3Extent of automation
If single equipment automation is implemented, then automation capability is improved, but overall laboratory efficiency and resource utilization deteriorate
Solution Approach 1:
The system merges multiple automated functions into an integrated laboratory system: the robotic arm combines sample transfer, chemical handling, and equipment operation capabilities. The control system integrates scheduling, monitoring, and data collection functions, creating a cohesive automated workflow that maximizes overall laboratory productivity rather than isolating individual equipment automation.
4Adaptability or versatility
If manual chemical and sample handling is used, then operational flexibility is improved, but experimental cost and time consumption deteriorate
Solution Approach 1:
The robotic system enables continuous automated operations where samples and chemicals are handled without interruption. The system can operate 24/7 without breaks, performing sequential operations continuously from sample retrieval through processing to result collection, dramatically reducing total time consumption compared to manual batch processing while maintaining flexibility through programmable sequences.
Data Source
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AI summary
A wet-processing dark laboratory for scientific research is disclosed, which relates to the technical field of semiconductor cleaning and etching and includes a laboratory body, a wet-processing equipment, a transfer robot, a sample supplying and storing apparatus, a chemical supplying and storing apparatus, and a control apparatus. The laboratory body is configured to provide a clean space. The transfer robot includes a moving device, a mechanical arm device, at least one end effector, and an accompanying device. The accompanying device can move with the moving device and provide a temporary storage space. The mechanical arm device is mounted on the moving device. The at least one end effector is mounted on the mechanical arm device for grasping a semiconductor sample and/or a chemical tank. The above design enables 24/7 experiments conduction without the need for human presence, which forms a dark laboratory. It significantly improves efficiency of scientific research and apparatus utilization, improves reliability of experimental results, reduces experiment cost, and effectively ensures safety of the experimenter.