Automatic Chemical Sampling Equipment for Semiconductor Purity
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Solution Overview
Problem
The current chemical liquid sampling process in semiconductor production is time-consuming and prone to contamination, affecting the quality and productivity of semiconductor manufacturing.
Innovation Solution
An automatic sampling equipment with a sampling bottle, cap rotating device, and chemical liquid outlet pipelines is introduced, along with a method that includes cleaning and shaking steps to ensure accurate and efficient sampling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual sampling process is used, then operation flexibility is maintained, but sampling time increases and contamination risk occurs
Solution Approach 1:
The automatic sampling module performs sampling operations autonomously without manual intervention. The system self-regulates the sampling process including bottle positioning, cap opening/closing, and liquid transfer, thereby eliminating time loss associated with manual operations while maintaining continuous productivity
Solution Approach 2:
Manual mechanical sampling operations are replaced with an automated control system that coordinates the sampling bottle holder, cap rotating device, and outlet pipeline moving device. This substitution eliminates the time-consuming nature of manual sampling while maintaining operational flexibility through programmable control
2Reliability
If manual sampling process is used, then equipment complexity is low, but contamination risk increases
Solution Approach 1:
The automatic sampling module acts as an intermediary between the chemical liquid storage system and the sampling bottle. This intermediary system controls all contact points between the chemical liquid and external environment, including sealed connections between the outlet pipeline and sampling bottle, and automated cap operation, thereby preventing contamination while maintaining sampling reliability
Solution Approach 2:
The system creates a controlled environment for sampling operations where the chemical liquid is transferred through sealed connections and protected pathways. The automatic module operates in a manner that minimizes exposure to external contaminants, effectively creating an inert sampling environment that preserves liquid purity
3Productivity
If automatic sampling module is introduced, then sampling efficiency improves, but device complexity increases
Solution Approach 1:
The automatic sampling module is designed with multi-functional components that perform multiple operations. The sampling bottle holder simultaneously positions and secures bottles, the cap rotating device both opens and closes caps, and the outlet pipeline moving device both transports and aligns pipelines. This multi-functionality reduces the number of separate components needed, thereby limiting the increase in device complexity while maintaining high sampling efficiency
Data Source
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AI summary
An automatic sampling equipment (100) includes a sampling bottle (140) and an automatic sampling module (120). The sampling bottle (140) includes a cap (142) and a bottle body (144). The automatic sampling module (120) is utilized to hold the sampling bottle (140) for sampling a chemical liquid. In addition, the automatic sampling module (120) includes a sampling bottle holder (210) and a cap rotating device (250). The sampling bottle holder (210) is utilized to hold the body of the sampling bottle (140), and the cap rotating device (250) is equipped above the sampling bottle holder (210) to open or close the cap (142) of the sampling bottle (140). Furthermore, an automatic sampling method is also disclosed herein.