Automatic Concentration Control for Semiconductor Processing Tanks
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Solution Overview
Problem
Manual adjustment of chemical concentrations in semiconductor processing tanks is time-intensive and costly, requiring significant manpower to monitor and regulate the moisture or water content in chemical mixtures.
Innovation Solution
An automatic concentration control system using a chemical sensor and electrically controllable valves to precisely control the amount of chemicals, such as water, in the mixture, allowing for real-time monitoring and adjustment based on sensed properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If manual adjustment of chemical concentrations is used, then flexibility in controlling moisture content is maintained, but labor costs and time consumption increase significantly
Solution Approach 1:
The system enables self-service operation where the chemical concentration control performs automatically without human intervention. The chemical sensor continuously monitors the mixture concentration, and the controller automatically adjusts the flow rate of chemical supply based on sensed properties, making the system self-regulating and eliminating manual operation requirements.
Solution Approach 2:
The patent replaces manual mechanical adjustment operations with an automated control system comprising chemical sensors, controllers, and electrically controllable valves. This substitution eliminates the need for human operators to manually monitor and adjust chemical concentrations, transitioning from mechanical/manual control to automated electrochemical control.
2Productivity
If manual monitoring and adjustment of chemical concentration is performed, then system complexity remains low, but productivity decreases due to time-intensive operations
Solution Approach 1:
The chemical sensor continuously monitors the chemical mixture concentration in real-time, and the controller continuously adjusts the chemical supply flow rate based on sensed properties. This continuous monitoring and adjustment eliminates idle time between manual checks and ensures uninterrupted optimal processing, significantly improving productivity compared to periodic manual monitoring.
Solution Approach 2:
The system implements closed-loop feedback control where the chemical sensor continuously measures the actual chemical concentration in the mixture, feeds this information back to the controller, and the controller automatically adjusts the chemical supply flow rate to maintain the desired concentration. This real-time feedback mechanism eliminates delays associated with manual sampling and adjustment, accelerating the response time for concentration control.
3Manufacturing precision
If manual operation of valves is used, then ease of operation is maintained through simple manual control, but manufacturing precision decreases due to human error
Solution Approach 1:
The patent replaces manual mechanical valve operation with electrically controllable valves actuated by a controller based on sensor feedback. This substitution eliminates human error in reading concentration measurements and making adjustment decisions, achieving precise and repeatable concentration control that is more accurate than manual operation can provide.
Solution Approach 2:
The system performs self-adjustment of chemical concentration without human intervention. The controller automatically interprets sensor data and adjusts valve positions to maintain optimal concentration, eliminating variability introduced by different operators and ensuring consistent precision across all operations.
4Reliability
If automatic concentration control is implemented, then productivity increases through real-time monitoring, but device complexity increases due to additional components
Solution Approach 1:
The controller serves multiple functions: it receives signals from the chemical sensor, processes the sensed properties, determines the appropriate flow rate adjustment, actuates the electrically controllable valve, and maintains the desired chemical concentration. This multi-functionality consolidates what could be separate components into a single integrated control unit, reducing overall system complexity while maintaining automatic concentration control capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system reduces labor costs and time, ensures stable chemical concentrations, minimizes defects in semiconductor wafers by maintaining precise control of water or moisture content, and reduces cross-pollution between processing tanks.
Implementation Method 1
A chemical sensor senses properties of a chemical mixture within a processing tank
Data Source
AI summary
Semiconductor processing systems and methods are provided in which an amount or concentration of a chemical in a chemical mixture contained in a tank is automatically controlled based on a sensed properties of the chemical mixture. In some embodiments, a semiconductor processing system includes a processing tank that is configured to contain a chemical mixture. A chemical sensor is configured to sense one or more properties of the chemical mixture. The system further includes an electrically controllable valve that is configured to adjust an amount of the first chemical in the chemical mixture based on the sensed one or more properties of the chemical mixture.