Autonomous Transfer Robot With Vertical FOUP Stacking
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Solution Overview
Problem
Existing automatic guided vehicles in semiconductor manufacturing systems can only carry one front opening unified pod (foup) at a time and require manual loading and unloading, leading to inefficiencies in transfer operations.
Innovation Solution
An autonomous moving transfer robot with a main body, running mechanism, operation mechanism, and load bearing mechanism that allows for the automatic transfer of multiple target objects without manual intervention, utilizing driving wheels, mechanical arms with grippers, and a control system to manage movement and positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual loading and unloading is used, then the device complexity is reduced, but the productivity decreases
Solution Approach 1:
The robot performs automatic loading and unloading of FOUPs without manual intervention. The manipulator automatically grips the FOUP from the input rack, transports it to the output rack, and releases it, enabling the system to serve itself and eliminating the need for operators to manually load and unload pods.
Solution Approach 2:
The robot positions and grips the FOUP at the input rack before movement occurs. The manipulator prepares the gripper in the correct position and orientation in advance, then executes the pickup and transport sequence, ensuring smooth automated operation without manual intervention during the transfer process.
2Productivity
If only one FOUP is carried at a time, then the device complexity is reduced, but the productivity decreases
Solution Approach 1:
Multiple bearers are arranged vertically stacked in the load bearing mechanism, transitioning from a single horizontal carrying position to multiple vertical levels. This allows the robot to carry multiple FOUPs simultaneously at different heights, increasing throughput without proportionally increasing the robot's horizontal footprint or base complexity.
Solution Approach 2:
The load bearing mechanism is divided into multiple independent bearers that can be individually controlled. Each bearer can be independently positioned and manipulated, allowing the system to load and unload multiple FOUPs in sequence or parallel, thereby increasing productivity while maintaining manageable structural complexity through modular segmentation.
3Area of stationary object
If multiple bearers are arranged vertically, then the space utilization is improved, but the manufacturing precision requirements increase
Solution Approach 1:
Position sensors and control systems monitor the location of each vertically stacked bearer, providing real-time feedback to the control unit. This enables precise positioning and adjustment of each bearer's vertical and horizontal coordinates, ensuring accurate FOUP placement and retrieval while maintaining stable operation despite the increased precision requirements from vertical stacking.
Data Source
AI summary
An autonomous moving transfer robot, including a main body with a base and a vertical plate; a traveling mechanism having a driving wheel and a driven wheel mounted on the base; a working mechanism having two manipulators, each with a mechanical arm, a proximal end of which is connected to the vertical plate, and a clamp pivotally connected to a distal end of the mechanical arm; the mechanical arms enable the clamps to reach a desired position, and the manipulators drive the clamps to grip and release a target object; a carrying mechanism having a plurality of plate-shaped carrying members for carrying the target object, the carrying members being fixed on the same side of the vertical plate, and arranged at intervals along the vertical direction; and a control system for controlling the walking/stopping and steering of the traveling mechanism and the movement of the manipulators.