Autotuned Screen Printing Alignment for Solar Cells

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Solution Overview

Problem

The existing screen printing processes for solar cells face challenges with mis-alignment of patterns on substrates due to positioning errors, leading to poor device performance and increased manufacturing costs, necessitating an improved method for controlling substrate positioning and increasing throughput.

Innovation Solution

An automated deposition process that utilizes alignment marks on substrates, optical inspection systems, and a system controller to accurately position and orient substrates, calculating offsets to ensure precise alignment and improve the alignment of subsequent layers, thereby enhancing the accuracy and efficiency of the screen printing process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If manual calibration of substrate positioning is used, then positioning accuracy can be adjusted for different substrate batches, but the process becomes time-consuming and requires frequent adjustments

Engineering Contradiction:
Improvesubstrate positioning accuracyVSAvoidcalibration time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The system uses alignment marks printed on the substrate itself to automatically determine positioning and orientation. The substrate effectively calibrates itself by providing reference features that the optical inspection system detects, eliminating the need for manual calibration operations while maintaining high positioning accuracy across different substrate batches

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The optical inspection system detects the actual position and orientation of alignment marks on the substrate, feeds this information back to the system controller, which then calculates correction values. This closed-loop feedback mechanism automatically adjusts positioning for each substrate without manual intervention, resolving the contradiction between precision and time loss

Inventive Principle:
Principle #23Feedback

2Productivity

If automated substrate positioning is used, then throughput increases, but mis-alignment errors due to positioning errors still occur

Engineering Contradiction:
Improvesubstrate throughputVSAvoidpattern alignment accuracy
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

Alignment marks are printed on the substrate before the screen printing process. These pre-established reference features enable the optical inspection system to detect and calculate positioning offsets in advance, allowing the system to compensate for automation-induced alignment errors while maintaining high throughput

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system replaces manual mechanical positioning adjustments with an optical detection and computational correction system. The optical inspection system captures images of alignment marks, and the system controller calculates precise correction values based on detected positional deviations, substituting mechanical calibration with optical-mechanical integration that maintains both speed and precision

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If frequent manual adjustment of substrate positioning is performed, then alignment accuracy is maintained, but device yield decreases due to production interruptions

Engineering Contradiction:
Improvealignment accuracyVSAvoiddevice yield
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The substrate provides its own alignment reference through pre-printed alignment marks. The system automatically detects these marks and adjusts positioning without requiring operator intervention, maintaining alignment accuracy while keeping production continuous and maximizing device yield

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system implements continuous automatic feedback control where the optical inspection system monitors alignment mark positions, the controller calculates correction values, and the positioning system applies adjustments in real-time. This automated feedback loop maintains alignment accuracy without production interruptions, resolving the contradiction between precision and yield

Inventive Principle:
Principle #23Feedback

Data Source

PatentUS9204556B2Autotuned screen printing process
Publication Date: 2015.12.01 APPLIED MATERIALS INC
  • US9204556B2 patent drawing
  • US9204556B2 patent drawing
  • US9204556B2 patent drawing

AI summary

Embodiments of the invention generally provide apparatus and methods of screen printing a pattern on a substrate. In one embodiment, a patterned layer is printed onto a surface of a substrate along with a plurality of alignment marks. The locations of the alignment marks are measured with respect to a feature of the substrate to determine the actual location of the patterned layer. The actual location is compared with the expected location to determine the positional error of the patterned layer placement on the substrate. This information is used to adjust the placement of a patterned layer onto subsequently processed substrates.